Multilayer heat-conductive sheet, and manufacturing method for multilayer heat-conductive sheet
A technology of heat conduction sheet and heat conduction layer, which is applied in semiconductor/solid-state device manufacturing, cooling/ventilation/heating transformation, semiconductor devices, etc., can solve the problems of reduced performance of heat conduction sheet, poor adhesion, interface damage, etc., to improve processability , the effect of improving reworkability
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[0077] Example
[0078] The thermoplastic resin and the inorganic filler were dispersed and dissolved in a mixed solvent of toluene:MEK (methyl ethylketone)=1:1 to obtain a non-sticky layer raw material liquid with a solid content of 10%.
[0079] The types and names of thermoplastic resins and inorganic fillers, the average particle size of inorganic fillers ("filler D50" column), and the weight ratio of inorganic fillers to thermoplastic resins are shown in Examples 1 to 6 and Comparative Examples 1 to 4 in Table 1 below. .
[0080] Next, the non-sticky layer raw material liquid was coated with a bar coater, and dried with a dryer at 90°C for 5 minutes to obtain figure 2 (a) The non-adhesive layer 11 shown.
[0081] The thickness of the non-adhesive layer 11 is shown in Table 1 below.
[0082] [Table 1]
[0083] Table 1 Contents of non-sticky layer
[0084] .
[0085] The preparation composition is the heat conductive layer raw material liquid in the following Table 2, which is coated...
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