Scalable force and electric field transmission electron microscope in situ sample rod

Abstract

The invention provides a scalable force and electric field transmission electron microscope in situ sample rod which comprises a coarse adjusting device, a signal adapter, a sample rod shell, a coarse adjustment adapter, a switching fixed rod, a coaxial ring, a transmission rod, a piezoelectric ceramic holder, a sample rod head, a piezoelectric ceramic tube, a fixed part, a needle fixed device, a conductive needle tube, a conductive electrode, a nano tip and a test electrode. Test and the control signal lines are inserted into the signal adapter, the electrical control connection of an external control testing module and the piezoelectric ceramic tube, the nano tip and a sample is realized. After the sample rod is inserted into a transmission electron microscope, the coarse adjusting device is controlled to accurately move the nano tip to the fine adjustment range of the sample, through adjusting the driving signal of the external control testing module, the in situ deformation of the piezoelectric ceramic tube is controlled, thus the nano tip is controlled to accurately move in a nano level in a fine adjustment range, finally the mechanical and optical contact of the nano tip and a testing sample is realized, and a force and electric performance in situ experiment is completed.

Description

technical field [0001] The invention belongs to the field of nanometer material measurement. The invention relates to the research fields of transmission electron microscope accessories and in-situ measurement of nanomaterials, and specifically discloses an expandable electromechanical two-field transmission electron microscope in-situ sample rod. Background technique [0002] With the continuous maturity and development of electron microscope in-situ technology, transmission electron microscope (transmission electron microscope or TEM) no longer only characterizes the structure of materials, but also can realize high-precision nanofabrication and performance testing. Performance (such as force, electricity, heat) changes are linked. [0003] To complete the above functions, a series of in-situ physical property test sample rods must be used. However, due to the limitation of the sample chamber size (millimeter level) of the transmission electron microscope, the difficulty ...

AI Technical Summary

Problems solved by technology

[0004] At home and abroad, there is no expandable electromechanical two-field transmission electron microscope in-situ sample holder. At present, the commercial in-situ mechanical or electrical transmission electron microscope sample holder has single function and high price, and has the following problems:

However, since the maximum output displacement of the piezoelectric ceramic tube is generally lower than tens of microns, the sample must be placed within a few tens of microns away from the nanoprobe when loading, which increases the difficulty of the experimental operation.

[0006] 2. Existing commercial sample rods, the replacement of the front-end nano-probe is more complicated, and the material manufacturer is limited, so the installation is difficult

[0007] 3. On the basis of ensuring the mechanical loading, the existing sample rods have relatively simple electrical functions, most of which only meet the requirements of single-electrode testing, and the sample rod head and the sample rod are solidified as a whole, which cannot realize the replacement of special samples and the effective expansion of the function of the sample rod

Images