A flip-chip led microdisplay array and manufacturing method thereof

Abstract

The invention discloses an LED micro display array flip chip and a manufacturing method. The flip chip comprises a substrate, a plurality of grooves, a transparent thin film layer and an LED micro pixel array arranged on the substrate, wherein the plurality of grooves are etched in the substrate in an array; the grooves are filled with the transparent thin film layer; various LED micro pixels correspond to the grooves one by one; a refractive index of the transparent thin film layer is greater than 2.3; the transmittance on blue light or green light is greater than 97%; each LED micro pixel comprises an N-type GaN layer, a multi-quantum well layer and a P-type GaN layer which are sequentially deposited on the substrate; the N-type GaN layers of the LED micro pixel array are connected into a whole to form a common cathode, and an N electrode metal contact layer is deposited on the common cathode; and a P electrode metal contact layer is deposited on the P-type GaN layers in an LED micro pixel region. According to the LED micro display array flip chip, a transparent thin film layer material with a high refractive index is deposited on the substrate, so that better convergence of light-emitting layer light sources is achieved; the problem that light is diffused after entering a sapphire substrate with a low refractive index is solved; interference of outlet light between pixel units is reduced; and the resolution of the LED micro display array is improved.

Description

technical field [0001] The invention relates to LED micro-displays, in particular to an LED micro-display array flip-chip and a manufacturing method thereof. Background technique [0002] Light-emitting diode (LED) is a solid-state semiconductor device with high efficiency, energy saving, environmental protection, and long life. It is currently widely used in traffic indication, indoor and outdoor full-color display, LCD TV backlight, lighting, etc. The LED array-based micro-display technology is a display technology that integrates a high-density micro-sized ultra-high-brightness two-dimensional array of light-emitting diodes on a chip and uses a silicon-based cmos circuit to drive it. Compared with The OLED and LCoS micro-display systems in the prior art have the advantages of high brightness and high contrast, firmness, fast response, and low cost. [0003] Ultra-high brightness GaN-LED microdisplay is an active luminous monochrome display device with compact structure, ...

AI Technical Summary

Problems solved by technology

However, light from the light-emitting layer of such a high-density LED pixel array is emitted through n-GaN and sapphire substrates, and it is easy to cause light interference between pixels and enlargement of light spots.

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