Preparation method for narrow size distribution high-purity silicon nitride powder
A narrow particle size distribution, silicon nitride powder technology, applied in chemical instruments and methods, nitrogen compounds, inorganic chemistry, etc., can solve the problems of wide particle size distribution, high metal impurity content, affecting the use effect, etc., to ensure product purity. Effect
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Embodiment 1
[0016] (1) Add silicon nitride diluent to 10~30um high-purity silicon powder. The amount of silicon nitride diluent added is 10% of the high-purity silicon powder. No additives are used, and the raw materials for nitriding reaction are obtained by mixing evenly;
[0017] (2) Lay the nitriding reaction raw materials in step (1) into a layer of granular materials with multi-stage granularity and precise proportioning, and place them in the sintering furnace, and feed nitrogen to replace the air in the furnace. The nitrogen purity is 99.99%, and continue to feed Nitrogen, heated to 1400 ° C, nitriding reaction 5h, high-purity silicon powder and nitrogen fully react to obtain silicon nitride;
[0018] (3) After cooling to room temperature, the silicon nitride obtained in step (2) is crushed and subdivided by airflow milling to obtain high-purity silicon nitride powder with a narrow particle size distribution. The purity of the high-purity silicon nitride powder is 99.99%, particle...
Embodiment 2
[0020] (1) Add silicon nitride diluent to 20~50um high-purity silicon powder, the amount of silicon nitride diluent added is 20% of the high-purity silicon powder, no additives are used, and the nitriding reaction raw materials are obtained by mixing evenly;
[0021] (2) Lay the nitriding reaction raw materials in step (1) into a layer of granular materials with multi-stage granularity and precise proportioning, and place them in the sintering furnace, and feed nitrogen to replace the air in the furnace. The nitrogen purity is 99.99%, and continue to feed Nitrogen, heated to 1420 ° C, nitriding reaction 20h, high-purity silicon powder and nitrogen fully react to obtain silicon nitride;
[0022] (3) After cooling to room temperature, the silicon nitride obtained in step (2) is crushed and subdivided by airflow milling to obtain high-purity silicon nitride powder with a narrow particle size distribution. The purity of the high-purity silicon nitride powder is 99.999%, particle s...
Embodiment 3
[0024] (1) Add silicon nitride diluent to 10~40um high-purity silicon powder. The amount of silicon nitride diluent added is 12% of the high-purity silicon powder. No additives are used, and the raw materials for nitriding reaction are obtained by mixing evenly;
[0025] (2) Lay the nitriding reaction raw materials in step (1) into a layer of granular materials with multi-level granularity and precise proportioning, and place them in the sintering furnace, and pass in nitrogen to replace the air in the furnace. The purity of nitrogen is 99.999%, and continue to pass in Nitrogen, heated to 1450 ° C, nitriding reaction 10h, high-purity silicon powder and nitrogen fully react to obtain silicon nitride;
[0026] (3) After cooling to room temperature, the silicon nitride obtained in step (2) is crushed and subdivided by airflow milling to obtain high-purity silicon nitride powder with a narrow particle size distribution. The purity of the high-purity silicon nitride powder is 99.99...
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