Array zero setting high-precision laser large-working distance auto-collimation device and method

A high-precision, working distance technology, applied in the fields of precision measurement and optical engineering, it can solve the problems of inability to achieve self-collimation and micro-angle measurement, the range cannot be too large, and the reflected beam deviates from the entrance pupil.

Active Publication Date: 2016-12-14
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the...

Method used

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  • Array zero setting high-precision laser large-working distance auto-collimation device and method
  • Array zero setting high-precision laser large-working distance auto-collimation device and method
  • Array zero setting high-precision laser large-working distance auto-collimation device and method

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specific Embodiment 1

[0083] This embodiment is an embodiment of an array zeroing high precision laser large working distance self-collimation device.

[0084] The array zeroing high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimator mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; After the straight mirror 21 is collimated into a parallel light beam, it is reflected by the reflector 3 and incident on the surface of the measured object 5; the light beam reflected from the surface of the measured object 5 is then reflected by the reflective mirror 3 and collected by the feedback imaging system 6 imaging;

[0085] The feedback imaging system 6 is arranged between the light source 1 and the transmissive collimator 21, including a first feedback beam spli...

specific Embodiment 2

[0088] This embodiment is an embodiment of an array zeroing high precision laser large working distance self-collimation device.

[0089] The array zeroing high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 7 shown. On the basis of the specific embodiment 1, the array zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0090] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflector 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the secondary refl...

specific Embodiment 3

[0092] This embodiment is an embodiment of an array zeroing high precision laser large working distance self-collimation device.

[0093] The array zeroing high-precision laser large working distance self-collimation device of this embodiment, the structural diagram is as follows Figure 8 shown. On the basis of the specific embodiment 1, the array zeroing high-precision laser large working distance self-collimation device of this embodiment is also provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0094] The wavefront detection system 7 includes a wavefront detection beamsplitter 71 and a mirror deformation wavefront detector 73; the wavefront detection beamsplitter 71 is arranged between the mirror 3 and the measured object 5, and the air disturbance wavefront detection The device 72 is arranged on the reflected optical path of the wavefront detection spectroscope 71, and the mirror deformation wavefront detector 73 is arranged on the sec...

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Abstract

The present invention belongs to the precise measurement technology field and the optical engineering field, in particular relates to an array zero setting high-precision laser large-working distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system, and the method is characterized in that by adjusting the reflector, a reflected light beam returns to the center of an image plane of the feedback imaging system, and then by utilizing an angle deflection measurement device on the reflector, the angle change on the surface of a measured object is obtained. According to the present invention, by adding the reflector on a conventional auto-collimation angle measurement system, the problem that the reflected light of the measured object deviates the measurement system, so that the reflected light of the measured object can not be measured, can be avoided, and further the technical advantage that an auto-collimation working range is increased under a same working distance, or the working distance is increased under the same auto-collimation working range, is realized. In addition, by the concrete design of the devices, such as the collimating mirror, the feedback imaging system, the reflector, etc., the device of the present invention is simple in structure and low in manufacturing cost. Meanwhile, according to the present invention, the technical advantages of being able to monitor and measure environmental stability, and being rapid to measure are realized.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to an array zeroing high-precision laser large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters to h...

Claims

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Application Information

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IPC IPC(8): G01B11/26G01C15/00G02B27/30
CPCG01B11/26G01C15/002G02B27/30
Inventor 谭欣然朱凡王超谭久彬
Owner HARBIN INST OF TECH
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