Precision measurement system and method of internal diameter of circular hole
A precision measurement, round hole technology, applied in the direction of measuring devices, instruments, optical devices, etc., can solve the problem of low measurement accuracy, achieve high measurement accuracy, low cost, and easy measurement operation
Inactive Publication Date: 2016-12-21
HUAIYIN TEACHERS COLLEGE
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Problems solved by technology
[0006] The technical problem to be solved by the present invention is that the image measurement method in the existing round hole measurement scheme is limited by the resolution of the optical imaging system, and there is a problem of low measurement accuracy
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[0038] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0039] The microscopic focusing measurement technology proposed by the present invention is based on the microscopic imaging image shape (focal spot shape) of the focal point, and uses the geometric imaging law of the optical system to measure the inner diameter of the circular hole of the workpiece to be measured, which not only achieves high precision (the highest measurement accuracy It can measure the hole diameter of 0.05μm), and by moving the position of the workpiece to be measured up and down, it can also accurately measure the distribution of the diameter of the hole with the change of depth. Its realization principle is as follows:
[0040] figure 1 It is a schematic diagram of the confocal focusing of the optical system, wherein the first microscope objective lens 3 of the illumination optical device converges the light emitted by...
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The invention discloses a precision measurement system and method of an internal diameter of a circular hole. The system comprises a fiber light source, a first microscopic object lens, an objective table, a second microscopic object lens, an imaging lens and an area array camera. Light emitted by the fiber light source is converged through the first microscopic object lens, the light passes through the objective table and is converged on an optical axis of the second microscopic object lens to form a focus point, and then the light is parallel injected to the imaging lens through the second microscopic object lens and is converged at one point to go into the area array camera; and the objective table is moved, mutually symmetrical semicircular focal spot shapes are observed respectively through the area array camera, the focal point is respectively disposed on two opposite end points of the internal diameter of the circular hole, coordinates of the objective table at the moment are respectively recorded, and an absolute value of a difference between the two coordinates is the value of the internal diameter of the circular hole. According to the invention, based on the microscopic imaging image shape of a focus, by use of geometrical imaging rules of an optical system, the internal diameter of the circular hole of a detected workpiece is measured, the measurement precision is high, the measurement operation is simple, the cost is quite low, and popularization and promotion are facilitated.
Description
technical field [0001] The invention relates to the field of image measurement, in particular to a precision measurement system and method for the inner diameter of a circular hole. Background technique [0002] The round hole is an important feature of many parts. The processing quality of the round hole affects whether the function of the part can be realized normally. In the pillar industries of the national economy such as mechanical precision machining, aerospace, and automobile manufacturing, high-precision measurement of the shaft hole diameter It is the key technical issue, and the control of the diameter of the shaft hole will directly affect the assembly quality and even performance of the instrument or workpiece. [0003] In recent years, the precision measurement technology of shaft hole diameter has attracted more and more attention from metrology and testing departments in various countries, and high-precision hole diameter measurement is even more difficult in...
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Login to View More IPC IPC(8): G01B11/12
CPCG01B11/12
Inventor 左芬刘经佑雷枫
Owner HUAIYIN TEACHERS COLLEGE