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Device and method for coating inner wall of pipe

A technology for the inner wall of the tube and the inner electrode, which is used in gaseous chemical plating, metal material coating process, coating and other directions, can solve problems such as complex structure, and achieve the effect of high deposition rate, low vacuum system requirements, and high safety.

Inactive Publication Date: 2017-01-04
SOUTHWESTERN INST OF PHYSICS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved by the present invention is that in the prior art, the device for coating the inner wall of the tube using the plasma-enhanced chemical vapor deposition method has a complex structure and needs to be carried out under vacuum conditions, and then aims at conductive tubular workpieces, such as metal tubes , to provide a device with a simple structure that can realize coating on the inner wall of a tube by plasma enhanced chemical vapor deposition under atmospheric pressure, and the present invention also provides a method for coating a film using the above device

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  • Device and method for coating inner wall of pipe

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Embodiment Construction

[0025] The technical solutions and beneficial effects of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0026] The device for tube inner wall coating of the present invention includes a power supply and an inner electrode 1 that can be inserted into the tube 2 to be plated. The inner electrode 1 has a double-layer structure, the inner layer is a conductor 11, and the outer layer is a dielectric layer 12. Next, the inner electrode 1 is set in the tube 2 to be plated and connected to the power supply. The tube 2 to be plated is made of a conductive material and is also connected to the power source. In the energized state, a dielectric barrier discharge is generated between the inner electrode 1 and the tube 2 to be plated. , to excite the gas raw material to generate plasma to realize thin film deposition.

[0027] The device for coating the inner wall of a pipe of the present invention is applicab...

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Abstract

The invention discloses a device for coating the inner wall of a pipe. The device comprises a power source and an inner electrode capable of being inserted into the pipe to be coated. The inner electrode is of a double-layer structure, the inner layer is an electric conductor and the outer layer is a dielectric layer. In use, the inner electrode is arranged in the pipe to be coated and connected to the power source, and the pipe to be coated is made of a conductive material and is connected to the power source. In the electrified state, dielectric barrier discharge is generated between the inner electrode and the pipe to be coated, gas raw materials are stimulated to generate plasma, and thin film deposition is achieved. The invention further discloses a method for coating the inner wall of the pipe through the device for coating the inner wall of the pipe. By the adoption of the device and method for coating the inner wall of the pipe, the inner electrode with the dielectric layer on the surface and the conductive pipe to be coated are adopted for forming a dielectric barrier discharge structure manner, the device can achieve uniform discharge under the high pressure even under the atmospheric pressure, accordingly the uniform plasma or relatively uniform plasma is generated through stimulation of the high-frequency high-voltage power source, and the thin film deposition of the inner wall of the metal pipe is achieved.

Description

technical field [0001] The invention relates to the technical field of plasma material surface modification, in particular to a device and method for coating the inner wall of a tube. Background technique [0002] In actual industrial applications, there are a large number of inner surfaces of tubular workpieces that need to be modified, such as: oil pipelines in oil fields, chemical pipelines, automobile cylinders, and gun barrels and gun barrels in the military field. The inner walls of these tubular workpieces working in harsh environments need to be strengthened. The common method of modifying the inner wall of pipe fittings is mainly industrial electroplating, but the film deposited by the electroplating method has poor adhesion to the substrate, and a large amount of waste liquid that will pollute the environment is produced during the treatment process. [0003] Plasma-enhanced chemical vapor deposition can well solve the problems existing in the electroplating metho...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/513
Inventor 王坤李建
Owner SOUTHWESTERN INST OF PHYSICS
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