Device and method for coating inner wall of pipe
A technology for the inner wall of the tube and the inner electrode, which is used in gaseous chemical plating, metal material coating process, coating and other directions, can solve problems such as complex structure, and achieve the effect of high deposition rate, low vacuum system requirements, and high safety.
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[0025] The technical solutions and beneficial effects of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0026] The device for tube inner wall coating of the present invention includes a power supply and an inner electrode 1 that can be inserted into the tube 2 to be plated. The inner electrode 1 has a double-layer structure, the inner layer is a conductor 11, and the outer layer is a dielectric layer 12. Next, the inner electrode 1 is set in the tube 2 to be plated and connected to the power supply. The tube 2 to be plated is made of a conductive material and is also connected to the power source. In the energized state, a dielectric barrier discharge is generated between the inner electrode 1 and the tube 2 to be plated. , to excite the gas raw material to generate plasma to realize thin film deposition.
[0027] The device for coating the inner wall of a pipe of the present invention is applicab...
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