A Polarizing Beam Splitter Based on Metal Grating

Abstract

The invention belongs to the technical field of the optical device, and relates to a polarization beam splitter based on a metal raster. The main structure of the polarization beam splitter based on the metal raster comprises a covering film layer, a raster structure, a raster groove and a substrate. The upper surface of the raster structure is fixedly covered by the covering film layer, and the covering film layer is capable of realizing the function of a waveguide layer in the diffraction process of the raster structure and protecting the raster structure. The silver raster structure is used for preparing the parallelly distributed raster grooves through the etching technology. The raster groove is 300 nm in depth, the duty ratio of the raster is 0.21, and the raster period of the raster structure is 180 nm. The substrate of the SiO2 material is fixedly positioned on the lower surface of the raster structure. The polarization beam splitter based on the metal raster is on the basis of the silver raster structure, and has advantages of high diffraction efficiency, high extinction ratio, good polarization performance, good technology tolerance, simple main structure, convenient use, good market application prospect and friendly application environment. The spectral bandwidth is wide, and up to 207 nm. The performance can satisfy the requirements to the polarization beam splitter in the field of the optical device.

Description

Technical field: [0001] The invention belongs to the technical field of optical devices, and relates to a polarization beam splitter, in particular to a metal grating-based polarization beam splitter. As the material of polarization beam splitting grating, its performance is better than that of traditional beam splitter, and it is an optical component with excellent performance. Background technique: [0002] With the advent of the information age and the continuous development of science and technology, we have slowly entered the information and communication era from the electronic communication era. People's demand for quickly obtaining a large amount of information anytime and anywhere has promoted the rapid development of electromagnetic theory and micro-processing technology, making We have been able to use light waves as the carrier, using light waves to have extremely high time and space bandwidth products, high parallelism and non-interference, and to transmit infor...

AI Technical Summary

Problems solved by technology

In the prior art, no beam splitter based on a metal polarization grating has been manufactured for a wave band with a center wavelength of 800nm. Therefore, it involves the preparation of a metal grating-based polarization beam splitter, using metal silver as the polarizing beam splitter Materials that can maintain extremely high polarization beam splitting capabilities in a wide spectral range near the 800nm ​​band

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