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Manufacturing method of polydimethylsiloxane (PDMS) micro-fluidic chip having high aspect-ratio structure

A polydimethylsiloxane, microfluidic chip technology, applied in chemical instruments and methods, laboratory utensils, laboratory containers, etc., can solve problems such as small aspect ratio of micro-columnar structures, and achieve low prices. , Simple steps, low cost effect

Active Publication Date: 2017-02-15
西安西行者电子科技有限公司
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Problems solved by technology

[0005] In order to overcome the shortcomings of the small columnar structure aspect ratio in the microfluidic chip manufactured by the existing microfluidic chip manufacturing method, the present invention provides a method for manufacturing a polydimethylsiloxane microfluidic chip with a high aspect ratio structure

Method used

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  • Manufacturing method of polydimethylsiloxane (PDMS) micro-fluidic chip having high aspect-ratio structure

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Embodiment Construction

[0016] refer to figure 1 . The specific steps of the method for manufacturing the high aspect ratio structure of the polydimethylsiloxane microfluidic chip of the present invention are as follows:

[0017] ① First, design the reverse-phase photolithography mask according to the chip function required by the application.

[0018] ② Coat the photoresist SU8 reagent on the silicon wafer. The type of photoresist SU8 reagent is determined by referring to the height information of the three-dimensional structure of the chip and consulting the photoresist SU8 reagent manual. After the coating is completed, the surface is evenly glued.

[0019] ③ The photoresist SU8 reagent on the surface of the silicon wafer is evenly baked, and then etched using the reverse photolithography mask in the first step to obtain a reverse photoresist SU8 mold.

[0020] ④ Equipped with PDMS reagent (conventional 10:1), complete casting, baking, peeling and cutting on the photoresist SU8 mold to obtain a...

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Abstract

The invention discloses a manufacturing method of a polydimethylsiloxane(PDMS)micro-fluidic chip having a high aspect-ratio structure, and is used for solving the technical problem that in a micro-fluidic chip manufactured by a conventional manufacturing method of the micro-fluidic chip, the aspect ratio of a miniature columnar structure is low. The manufacturing method is characterized by comprising the following steps of manufacturing a photoresist SU8 mold through a reverse phase mould; then based on the photoresist SU8 mold, casting a PDMS chip by using a PDMS reagent, wherein the obtained PDMS chip is continued to be used as a mold; at the same time, preparing a surfactant Brij@52 reagent according to the proportion of a surfactant Brij@52 to acetone to deionized water being 1 to 1 to 8, dissolving the surfactant Brij@52 reagent, coating the dissolved surfactant Brij@52 reagent on the surface of the PDMS chip, and casting the PDMS reagent on the surface of the PDMS chip; and after solidification, performing stripping so as to obtain the PDMS chip finally. According to the manufacturing method disclosed by the invention, a two-step method is adopted to complete the manufacturing of the PDMS chip, so that additionally adding other equipment is not needed; and the whole manufacturing process is low in cost and simple in steps, and the purpose of obtaining a micron columnar structure of which the aspect ratio achieves 25 is finally realized.

Description

technical field [0001] The invention relates to a method for manufacturing a microfluidic chip, in particular to a method for manufacturing a polydimethylsiloxane microfluidic chip with a high aspect ratio structure. Background technique [0002] Achieving high aspect ratio structures is a key technology for fabricating complex micro-nanofluidic chips. Polydimethylsiloxane (polydimethylsiloxane: PDMS) is an important material for realizing micro-nanofluidic chips, and because PDMS is a flexible material, it is difficult to use PDMS materials to fabricate structures with high volume-to-area ratio, which limits the realization of complex chip structures . [0003] The document "Rapid replication of master structures by double casting with PDMS, Lab on a Chip, 9(20), 3000-3002(2009)." discloses a two-step method for manufacturing complex structures of PDMS chips. The method uses hydroxypropyl methylcellulose as a chip coating agent, and is used to realize the method that a PD...

Claims

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Application Information

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IPC IPC(8): B29C39/02B29C39/22B29C33/60B29C33/38B01L3/00B29K83/00
CPCB01L3/502707B29C33/3842B29C33/60B29C39/006B29C39/02B29K2083/00
Inventor 王少熙
Owner 西安西行者电子科技有限公司
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