A full-spectrum 800nm-2500nm dual-detector miniature near-infrared spectrometer
A near-infrared spectrometer and dual-detector technology, which is applied in the field of spectral measurement, can solve the problems of lack of continuous spectrum, unable to preprocess the spectrum, poor wavelength resolution, etc., to achieve stable optical path structure, improve control stability and accuracy , the effect of reducing the size of the instrument
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[0025] The present invention will be further described below in conjunction with the drawings.
[0026] See figure 1 In an embodiment of the present invention, the optical path system of the miniature near-infrared spectrometer is composed of a near-infrared light source 1, an incident slit 2, a concave collimator mirror 3, a MOEMS scanning grating micromirror 4, a concave imaging mirror 5, and an exit slit 6. , 500nm-1700nm single tube near infrared detector 7 and 900nm-2600nm single tube near infrared detector 8.
[0027] In this embodiment, an improved Czerny-Turner structure of the optical path system is adopted, and the MOEMS scanning grating micromirror 4 is used as the optical axis. Two groups of 100mm concave collimator 3, the distance between the center of mass and the vertical axis of the optical axis is 16.5mm and 19.5mm respectively, and the off-axis angle is -10 o And 5 o , The rotation angle of MOEMS scanning grating micromirror 4 is ±6.5 o , And install a single-tube...
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