Large-aperture ultra-smooth surface defect detection device and method

Abstract

The invention provides a large-aperture ultra-smooth surface defect detection device and method. The device mainly comprises a laser device, a laser beam expanding system, a high-reflectivity mirror, a polarizer, a polarization splitting prism, a 1 / 4 wave plate, a rotary prism, a telecentric field lens, a high-angle-scattering light detector, a low-angle-scattering light detector, a line triggering detector, a reflection light detector, a precise display platform and a computer. Detection efficiency of a large-aperture optical element can be remarkably improved, and the situation that detection results are severely influenced by vibration, axial jumping and the like, caused by high-speed rotation, of the large-aperture optical element is avoided. Surface defects can be classified, and it can be recognized whether the detected defects are pits, scratches, protruding dust, fibers and the like.

Description

technical field [0001] The invention relates to surface defects, in particular to a detection device and detection method for large-diameter ultra-smooth surface defects, which can realize identification and classification of defects. Background technique [0002] In high-tech fields such as precision optical engineering, semiconductor manufacturing, precision machinery manufacturing, and national defense and military industry, there are strict requirements on the surface defects of the processed materials. Surface defects refer to small defects such as scratches and pits that are randomly distributed in different shapes and sizes on the surface of components in various processes such as processing and handling. The existence of these tiny defects will seriously affect the performance of components. For example, in high-power laser systems, surface defects of optical components will greatly reduce the laser damage threshold, causing damage or even destruction of optical comp...

AI Technical Summary

Problems solved by technology

However, this method uses a single-point laser beam scanning measurement, and it takes a long time to inspect large-aperture optical components

At the same time, the weight of large-aperture optical components is heavy, and the vibration and axial runout caused by high-speed rotation will seriously affect the severity of the detection results. Therefore, this method cannot meet the requirements for surface defect detection of large-aperture optical components.

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