Large-aperture ultra-smooth surface defect detection device and method

An ultra-smooth surface and detection device technology, which is used in measurement devices, optical testing of flaws/defects, and material analysis by optical means. , large-caliber optical components and heavy weight, etc., to achieve the effects of reliable detection results, shortening detection time, and improving detection efficiency

Active Publication Date: 2017-02-22
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI +1
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  • Application Information

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Problems solved by technology

However, this method uses a single-point laser beam scanning measurement, and it takes a long time to inspect large-aperture optical components
At the same time, the weight of large-aperture optical components is heavy, and the vibr

Method used

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  • Large-aperture ultra-smooth surface defect detection device and method
  • Large-aperture ultra-smooth surface defect detection device and method
  • Large-aperture ultra-smooth surface defect detection device and method

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[0041] Such as figure 1 As shown, the measurement is that the computer 18 controls the precision displacement platform drive circuit 17, so that the precision displacement platform 16 drives the sample 10 to be tested along the figure 2 Scanning is performed on the scanning route shown to realize the scanning of the entire surface of the sample 10 to be tested. The angle between the optical axis direction of the high-angle scattered light detector 11 and the surface normal of the sample 10 to be tested is less than 45°, and the angle between the optical axis direction of the low-angle scattered light detector 12 and the surface normal of the sample 10 to be tested is greater than 45° °. The reflected light detector monitors the reflective condition of the surface of the sample 10 to be tested in real time. The signals received by the high-angle scattered light detector 11, the low-angle scattered light detector 12, and the reflected light detector 14 are transmitted to the ...

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Abstract

The invention provides a large-aperture ultra-smooth surface defect detection device and method. The device mainly comprises a laser device, a laser beam expanding system, a high-reflectivity mirror, a polarizer, a polarization splitting prism, a 1/4 wave plate, a rotary prism, a telecentric field lens, a high-angle-scattering light detector, a low-angle-scattering light detector, a line triggering detector, a reflection light detector, a precise display platform and a computer. Detection efficiency of a large-aperture optical element can be remarkably improved, and the situation that detection results are severely influenced by vibration, axial jumping and the like, caused by high-speed rotation, of the large-aperture optical element is avoided. Surface defects can be classified, and it can be recognized whether the detected defects are pits, scratches, protruding dust, fibers and the like.

Description

technical field [0001] The invention relates to surface defects, in particular to a detection device and detection method for large-diameter ultra-smooth surface defects, which can realize identification and classification of defects. Background technique [0002] In high-tech fields such as precision optical engineering, semiconductor manufacturing, precision machinery manufacturing, and national defense and military industry, there are strict requirements on the surface defects of the processed materials. Surface defects refer to small defects such as scratches and pits that are randomly distributed in different shapes and sizes on the surface of components in various processes such as processing and handling. The existence of these tiny defects will seriously affect the performance of components. For example, in high-power laser systems, surface defects of optical components will greatly reduce the laser damage threshold, causing damage or even destruction of optical comp...

Claims

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Application Information

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IPC IPC(8): G01N21/95
CPCG01N21/8851G01N21/95G01N2021/8854
Inventor 邵建达刘世杰董敬涛吴周令陈坚倪开灶徐天柱
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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