Ultra-hard diamond-like antireflection film, infrared material comprising antireflection film as well as preparation method and application of antireflection film

A technology of diamond-like film and infrared material, which is applied in the field of infrared material and its preparation, superhard diamond-like anti-reflection film, which can solve the problems of anti-heavy friction of infrared window and limitation of high-speed wind and sand wear, and achieve strong resistance to seawater and other chemical factors for a long time Corrosion, strong high-speed wind and sand erosion, anti-heavy friction and high-speed wind and sand erosion effects

Active Publication Date: 2017-03-22
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the reported preparation methods of anti-reflection diamond-like carbon films on the surface of infrared materials are mainly PECVD method and ion bea

Method used

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  • Ultra-hard diamond-like antireflection film, infrared material comprising antireflection film as well as preparation method and application of antireflection film
  • Ultra-hard diamond-like antireflection film, infrared material comprising antireflection film as well as preparation method and application of antireflection film
  • Ultra-hard diamond-like antireflection film, infrared material comprising antireflection film as well as preparation method and application of antireflection film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Plating a-C:H / ta-C double-layer superhard diamond-like film on the Ge substrate is anti-reflection in the 8-12μm segment, and the center wavelength is 9μm. If the thickness of the two films is the same, the refractive index of a-C:H 2. The refractive index of ta-C is 2.7, and the physical thickness of the two films is 475nm, such as figure 1 shown.

[0036] (1) Use a dust-free cloth to polish the double-sided Φ50×2 Ge substrate, drop alcohol and wipe it under strong light.

[0037] (2) Put the substrate on the lower plate of the PECVD equipment and vacuumize to 3×10 -3 Pa, adjust the radio frequency power 200-2000w, plate the bottom a-C:H film, and the plating time is 10min.

[0038] (3) Place the substrate coated with a-C:H film on the target holder of the FCVA equipment so that it forms an angle of 45° with the beam. Adjust the bias voltage and the size of the arc current, and plate a ta-C film on the a-C:H film for 55 minutes.

[0039] (4) The transmittance test ...

Embodiment 2

[0045] The a-C:H / ta-C double-layer superhard diamond-like film is plated on the Ge substrate to increase the reflection in the 8-12μm segment, and the center wavelength is 9μm. According to the film system design software Essential Macleod software design, the refractive index of a-C:H 2, the physical thickness is 794nm, the refractive index of ta-C is 2.7, and the physical thickness is 213nm.

[0046] (1) Use a dust-free cloth to polish the double-sided Φ60×2 Ge substrate, drop alcohol and wipe it under strong light.

[0047](2) Put the substrate on the lower plate of the PECVD equipment and vacuumize to 3×10 -3 Pa, adjust the radio frequency power to 200-2000w, plate the bottom a-C:H film, and the plating time is 18min.

[0048] (3) Place the substrate coated with a-C:H film on the target holder of the FCVA equipment so that it forms an angle of 45° with the beam. Adjust the bias voltage and the size of the arc current, and plate a ta-C film on the a-C:H film for 25 minute...

Embodiment 3

[0051] Plating a-C:H / ta-C double-layer superhard diamond-like film on the Si substrate is anti-reflection in the 3-5μm segment, and the center wavelength is 4μm. If the thickness of the two films is the same, the refractive index of a-C:H is 2, The physical thickness is 212nm, the refractive index of ta-C is 2.7, and the physical thickness is 212nm.

[0052] (1) Wipe the double-sided polished Φ55×2 Si substrate with a dust-free cloth dipped in alcohol under strong light.

[0053] (2) Put the substrate on the lower plate of the PECVD equipment and vacuumize to 3×10 -3 Pa, adjust the radio frequency power to 200-2000w, plate the bottom a-C:H film, and the plating time is 8.6min.

[0054] (3) Place the substrate coated with a-C:H film on the target holder of the FCVA equipment so that it forms an angle of 55° with the beam. Adjust the bias voltage and the size of the arc current, and plate a ta-C film on the a-C:H film for 9.4 minutes.

[0055] (4) a-C:H / ta-C double-layer film...

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Abstract

The invention discloses an ultra-hard diamond-like antireflection film, an infrared material comprising the antireflection film as well as a preparation method and application of the antireflection film and belongs to the field of an optical material, wherein the antireflection film comprises an amorphous diamond-like film layer and a tetrahedral diamond-like film layer; and the tetrahedral diamond-like film layer is a surface layer of the antireflection film. The antireflection film disclosed by the invention has the advantages of being resistant to heavy friction and also high in infrared transmittance.

Description

technical field [0001] The invention relates to the field of optical materials, in particular to a superhard diamond-like carbon antireflection film, an infrared material with an antireflection film, a preparation method and an application thereof. Background technique [0002] Infrared materials can transmit medium-wave infrared and long-wave infrared very well, so they can be used to prepare optical components such as infrared windows. Optical components are often in environments such as friction or sandstorms. However, the commonly used infrared materials (commonly include The texture of Ge, Si, etc.) is not hard enough, the anti-friction ability is not strong, and the price of general infrared materials is very high, so due to the frequent replacement of components due to wear and tear, the waste of infrared materials and the increase of component costs are caused. In order to extend the infrared optical The service life of the components, reducing the cost and improving...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32C23C16/26C23C14/46C23C28/04G02B1/14
CPCC23C14/0605C23C14/32C23C14/46C23C16/26C23C28/046G02B1/14
Inventor 伏开虎金扬利邱阳祖成奎韩滨
Owner CHINA BUILDING MATERIALS ACAD
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