Double parallel LED light source mechanism for exposure machine

A technology of LED light source and parallel light source, which is applied in the direction of optomechanical equipment, microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of complex installation structure, high installation cost and high use cost, and achieve simple installation structure, The effect of reduced installation cost and convenient irradiation angle

Inactive Publication Date: 2017-03-22
DONGGUAN HAISHENG PHOTOELECTRICITY TECH
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AI-Extracted Technical Summary

Problems solved by technology

However, this traditional light source setting method has a big disadvantage. First, the energy of a single light source itself is not very sufficient. After the transition of the plane light mirror, the energy will be attenuated, and after reflection and refraction, a long distance is required. The energy will attenuate again, so that the light energy that finally reaches the exposure position will be significantly reduced, resulting in low exposure efficiency, and it will take a long time to complete an exposure. For example, the exposure time to complete a frame is generally more t...
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Method used

[0016] Edges of the first reflector 6 and the second reflector 7 are provided with a light limiting mechanism 8 ...
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Abstract

The invention discloses a double parallel LED light source mechanism for an exposure machine. The double parallel LED light source mechanism comprises a first reflector and a second reflector, wherein LED light sources are adopted by a light source; the light source comprises two groups of LED light sources, namely a first LED light source module and a second LED light source module; the first LED light source module is toward the first reflector; and the second LED light source module is toward the second reflector. Through the adoption of two groups of LED light sources, the two groups of light sources are arranged at the positions closer to the reflectors for directly irradiating the reflectors and a middle transition plane light mirror is omitted, so that the illumination intensity can be improved by over twice, the exposure efficiency can be improved by over three times, and if the exposure time for completing a same frame circuit board is only 5 seconds, the weekly power consumption is only more than 200 kilowatt-hours and is reduced by over 75%. Furthermore, an installation structure of the whole equipment is extremely simple, the installation cost is reduced by about 50% and adjustment of the irradiation angles is also greatly facilitated.

Application Domain

Photomechanical exposure apparatusMicrolithography exposure apparatus

Technology Topic

PhysicsOptoelectronics +4

Image

  • Double parallel LED light source mechanism for exposure machine

Examples

  • Experimental program(1)

Example Embodiment

[0012] In this embodiment, refer to figure 1 , The dual LED parallel light source mechanism for the exposure machine includes two mirrors, namely the first mirror 6 and the second mirror 7. The two mirrors are arranged on both sides of the exposure table 9 and inclined toward the exposure table 9 setting; the light source adopts LED light source, including two groups of LED light sources, namely the first LED light source module 4 and the second LED light source module 5, where the first LED light source module 4 faces the first mirror 6, which emits The light directly irradiates the first mirror 6 and is reflected by the first mirror 6 and then irradiates parallel light to the exposure table 9; the second LED light source module 5 faces the second mirror 7, and the light emitted directly irradiates the second mirror The mirror 7 is reflected by the second mirror 7 and irradiates the exposure table 9 in parallel light.
[0013] The first LED light source module 4 and the second LED light source module 5 are both planar array LED light sources, and both have the same structure.
[0014] The light source mechanism is installed in the frame 1 of the exposure machine, and the first light source fixing plate 2 and the second light source fixing plate 3 with adjustable angles are installed in the frame 1; the first LED light source module 4 is installed in the first On a light source fixing board 2, the second LED light source module 5 is installed on the second light source fixing board 3.
[0015] The first light source fixing plate 2 and the second light source fixing plate 3 are connected as a whole, and the whole is an angle bracket with adjustable angle. The first light source fixing plate 2 and the second light source fixing plate 3 are two sides of the angle bracket respectively Daughter board; the corner bracket is installed in the frame 1 through a movable fixing device.
[0016] The edge positions of the first reflector 6 and the second reflector 7 are both provided with a light limiting mechanism 8 for limiting the irradiation range of the light source, which can conveniently help adjust the light irradiation direction.
[0017] The present invention has been described in detail above. The above descriptions are only preferred embodiments of the present invention, and should not limit the scope of implementation of the present invention, that is, all changes and modifications made in accordance with the scope of this application shall still belong to the present invention. Invention coverage.

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Description & Claims & Application Information

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