Double parallel LED light source mechanism for exposure machine
A technology of LED light source and parallel light source, which is applied in the direction of optomechanical equipment, microlithography exposure equipment, photolithography exposure device, etc., can solve the problems of complex installation structure, high installation cost and high use cost, and achieve simple installation structure, The effect of reduced installation cost and convenient irradiation angle
Inactive Publication Date: 2017-03-22
DONGGUAN HAISHENG PHOTOELECTRICITY TECH
5 Cites 2 Cited by
AI-Extracted Technical Summary
Problems solved by technology
View more
Method used
View more
Abstract
The invention discloses a double parallel LED light source mechanism for an exposure machine. The double parallel LED light source mechanism comprises a first reflector and a second reflector, wherein LED light sources are adopted by a light source; the light source comprises two groups of LED light sources, namely a first LED light source module and a second LED light source module; the first LED light source module is toward the first reflector; and the second LED light source module is toward the second reflector. Through the adoption of two groups of LED light sources, the two groups of light sources are arranged at the positions closer to the reflectors for directly irradiating the reflectors and a middle transition plane light mirror is omitted, so that the illumination intensity can be improved by over twice, the exposure efficiency can be improved by over three times, and if the exposure time for completing a same frame circuit board is only 5 seconds, the weekly power consumption is only more than 200 kilowatt-hours and is reduced by over 75%. Furthermore, an installation structure of the whole equipment is extremely simple, the installation cost is reduced by about 50% and adjustment of the irradiation angles is also greatly facilitated.
Application Domain
Photomechanical exposure apparatusMicrolithography exposure apparatus
Technology Topic
PhysicsOptoelectronics +4
Image
Examples
- Experimental program(1)
Example Embodiment
PUM


Description & Claims & Application Information
We can also present the details of the Description, Claims and Application information to help users get a comprehensive understanding of the technical details of the patent, such as background art, summary of invention, brief description of drawings, description of embodiments, and other original content. On the other hand, users can also determine the specific scope of protection of the technology through the list of claims; as well as understand the changes in the life cycle of the technology with the presentation of the patent timeline. Login to view more.
Similar technology patents
Modular structure of integrated wall surface and installation method
Owner:ZHEJIANG MOBILE ELECTRIC
Scaffold mounting structure convenient to mount and dismount
Owner:THE FIRST COMPARY OF CHINA EIGHTH ENG BUREAU LTD
Connecting structure between steel column and high-rise truss beam
Owner:SHANGHAI GREENLAND CONSTR GRP
Fault detection method of cooling blowing equipment and spinning equipment
PendingCN113899574AGuaranteed fiber qualitySimple installation structure
Owner:CHINESE TEXTILE ACAD +1
Classification and recommendation of technical efficacy words
- Reduce installation costs
- Simple installation structure
Retractable castor mechanism of rack
Owner:深圳市阿尔法特网络环境有限公司
Automatic automobile braking line air tightness detecting device and detecting method thereof
Owner:ANHUI ANKAI AUTOMOBILE
Multi-path single-phase and three-phase mixed electric energy metering device and method
Owner:SUZHOU IND PRAK NEW HONGBO COMM TECH
Air-conditioning wireless networking method and device
Owner:HAIER GRP CORP +1
Floor board edge sealing strip
Owner:ZHEJIANG MEIDIAN NEW MATERIAL