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Pipeline structure with mutually independent functions of fixing and air exhausting

A technology that is independent of each other and the exhaust pipeline is applied in the field of pipeline structure, which can solve the problems of inconvenient installation and disassembly, heater fixing parts and exhaust pipeline occupying the center part of the outer wall of the cavity, etc., and achieve the effect of convenient installation

Inactive Publication Date: 2017-05-03
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a pipeline structure in which fixing and air extraction are independent of each other. In order to solve the problem that both the heater fixing part and the air extraction pipeline need to occupy the center of the outer wall of the cavity, and the installation and disassembly are inconvenient

Method used

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  • Pipeline structure with mutually independent functions of fixing and air exhausting
  • Pipeline structure with mutually independent functions of fixing and air exhausting
  • Pipeline structure with mutually independent functions of fixing and air exhausting

Examples

Experimental program
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Effect test

Embodiment 1

[0017] see figure 1 , a pipe structure with independent fixation and air extraction, installed on the reaction chamber of the equipment, a fixing part 1 is set, fixed on the lower surface of the chamber with screws, and the air extraction pipe 2 is processed into a ring structure to form a gas loop 3. Installed on the outer ring of the fixing part 1, the fixing part 1 is a cylindrical structure with a built-in heater.

[0018] Positioning holes are arranged on the bottom surface of the fixing piece, and after the heater is installed inside the fixing piece, it is positioned by the bottom surface and the positioning hole on the bottom surface of the fixing piece.

[0019] The fixing part 1 and the exhaust pipe 2 are connected to the bottom surface of the cavity through a flange.

[0020] In this embodiment, the center of the fixing part is adopted, and the sleeve structure is fixed on the lower surface of the cavity with screws, and the heater falls inside the fixing part. Th...

Embodiment 2

[0022] see figure 2 combine image 3 and Figure 4 , The difference from Embodiment 1 is that the bottom surface 5 of the fixing part is separated from the fixing part, and is welded on the fixing part 1 by welding, and the suction pipe 2 is also provided with a separate bottom surface 4 of the suction pipe.

[0023] The reason is that when the heater handle is very long and the air extraction pipe 2 is deep, it is difficult to guarantee the processing accuracy of the fixing part 1 and the bottom surface 4 of the air extraction pipe by machining, so welding processing methods can be used, such as figure 2 , 3 , 4 shown. Respectively process the bottom surface 4 of the air extraction pipe, the bottom surface 5 of the fixing piece and the main body. After the processing is completed, the bottom surface 4 of the air extraction pipe is welded to the main body, and the bottom surface 5 of the fixing piece is connected to the main body with a flange. The flanges of the fixing ...

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Abstract

The invention relates to a pipeline structure with mutually independent functions of fixing and air exhausting, and belongs to the technical field of semiconductor film deposition application and manufacturing. The purpose that dismounting and mounting of an inside assembly does not interfere with those of an air exhausting pipeline is achieved by adopting a structure mode that a fixing part is independent of the air exhausting pipeline. The pipeline structure is mounted on a reaction cavity of a device, and is characterized in that the fixing part is arranged, and is fixed on the lower surface of the cavity with a screw; the air exhausting pipeline is processed into an annular structure and is mounted on the outer ring of the fixing part; the fixing part adopts a cylindrical structure; and a heater is arranged in the fixing part. The fixing part is mounted at the center of the pipeline structure, a sleeve structure is adopted, the fixing part is fixed on the lower surface of the cavity with the screw, and the heater falls into the fixing part. The air exhausting pipeline is processed into the annular structure, and is mounted on the outer ring of the fixing part with the heater, and a circle of air exhausting holes are uniformly formed in the corresponding position of the annular structure of the air exhausting pipeline on the bottom surface of the cavity, so that the purpose of vacuumizing the cavity is achieved, and the air exhausting pipeline can be dismounted, and is convenient to mount.

Description

technical field [0001] The invention relates to a pipeline structure with independent fixation and air extraction. Through the independent structure of the fixing part and the air extraction pipeline, the disassembly and installation of the internal components and the disassembly and installation of the air extraction pipeline do not interfere with each other. It belongs to the semiconductor thin film deposition Application and manufacturing technology field. Background technique [0002] When the semiconductor coating equipment is performing the deposition reaction, the chamber needs to be continuously evacuated, the process gas is introduced, and then evacuated to ensure that the concentric ring diffusion of the gas has a great impact on the uniformity of the film formation. Therefore, the exhaust pipe needs to be placed in the center of the chamber. , pumping air in the center can ensure that the film is distributed in concentric circles as much as possible. During pumpi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56C23C16/54
Inventor 陈英男李景舒郑旭东关帅霍阳阳
Owner PIOTECH CO LTD