Door of diffusion furnace used for production of solar cell pieces

A technology of solar cells and diffusion furnaces, which is applied in the directions of diffusion/doping, circuit, crystal growth, etc., can solve the problems of injury to workers, achieve simple structure, and improve the effect of safe operation performance

Inactive Publication Date: 2017-05-03
周红兵
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the existing technology, in the diffusion furnace for producing solar silicon wafers, the temperature of the quartz boat in the furnace reaches 900°C or even higher during diffusion. The diffusion furnace generally uses infrared heating, and the infrared light is extremely strong, so it is very easy to cause damage to the operators. harm

Method used

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  • Door of diffusion furnace used for production of solar cell pieces
  • Door of diffusion furnace used for production of solar cell pieces

Examples

Experimental program
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Embodiment Construction

[0013] Such as figure 1 and 2 As shown, the furnace door of the diffusion furnace according to this embodiment includes a circular furnace door body 1, a door plate 2 forming an accommodating space 3 with the furnace door body 1, and quartz insulation cotton 30 filled in the accommodating space 3, The furnace door body 1 and the door plate 2 are made of opaque quartz glass.

[0014] The above-mentioned furnace door body 1 is provided with a plurality of filling ports 4, through which the quartz insulation cotton can be filled into the accommodation space 3, and at the same time, the furnace door body 1 also has the function of connecting it with the door plate 2. The outwardly extending flange 10 enhances the blocking effect of the furnace door on the furnace mouth of the diffusion furnace. The furnace door of the diffusion furnace of the present invention has a simple structure. Quartz insulation cotton is filled in the accommodating space formed by the door body and the do...

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Abstract

The invention relates to a door of a diffusion furnace used for production of solar cell pieces. The door comprises a door body which is arranged at the mouth of the diffusion furnace for blocking the mouth, a door plate forming accommodation space between the door body and the door plate, and quartz heat-preservation cotton filling the accommodation space, wherein the door body and the door plate are both opaque quartz glass and a filling port is formed in the door body. The door is arranged at the mouth of the diffusion furnace to effectively block temperature and infrared rays from the mouth and prevent vertical-surface diffusion of too high temperature and infrared rays from harming workers, so safe operation performance is improved.

Description

technical field [0001] The invention relates to a furnace door of a diffusion furnace, in particular to a furnace door of a diffusion furnace used in the production process of solar cells. Background technique [0002] In the production of solar cells, it is first necessary to dope some impurities on the P-type substrate silicon wafer, which are trace amounts of boron, phosphorus, antimony, etc., and then form a thin N-type layer by high-temperature diffusion to form a solar cell. The PN junction necessary for the cell. In the existing technology, in the diffusion furnace for producing solar silicon wafers, the temperature of the quartz boat in the furnace reaches 900°C or even higher during diffusion. The diffusion furnace generally uses infrared heating, and the infrared light is extremely strong, so it is very easy to cause damage to the operators. harm. Contents of the invention [0003] The technical problem to be solved by the present invention is to overcome the d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B31/00C30B29/06H01L31/18
CPCY02P70/50
Inventor 周红兵
Owner 周红兵
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