OLED panel display industry large-sized ultra-precision full-automatic coordinate measurement device
A technology of plane display and measurement equipment, applied in the detection field, can solve problems such as poor stability, achieve the effects of heat generation and wear, improve measurement accuracy, ultra-precision motion accuracy and reproducibility
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[0031] Figure 1-4 It shows an embodiment of a large-scale ultra-precise automatic coordinate measuring equipment for the OLED flat panel display industry of the present invention, which includes the following components:
[0032] The device body 1 is used for product size detection;
[0033] Air dryer 2, which controls the air temperature and humidity of the supply device, and purifies the air;
[0034] Control box 3, which accommodates various electrical parts and control parts, as well as lighting devices;
[0035] Console 4, the control part of the device, consists of a PC body, a control panel, a control box and a touch screen;
[0036] The desktop controller 5 controls the X, Y, and Z axis movements of the device body;
[0037] The device body is composed of a substrate platform 11, a lens unit 12, an X-axis drive unit 13, an X-axis air slider 14, a Y-axis drive unit 15, and a Y-axis drive slider 16. The substrate platform 11 is installed on a frame 17 On the top, th...
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