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Silicon-based gap-coupled direct millimeter-wave signal detection instrument

A signal detection, millimeter wave technology, applied in the direction of instruments, measuring devices, electric solid devices, etc., can solve the problems that restrict the development of signal detectors, and achieve the effect of improving detection efficiency

Active Publication Date: 2019-03-05
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, frequency, phase and power are the three major parameters that describe a complete millimeter wave signal. The detection of millimeter wave is the measurement of these three parameters. However, with the rapid increase of military demand, most of the original signal detection instruments can no longer Meet the current needs, especially various high-frequency problems in the microwave frequency band, which have always restricted the development of signal detectors

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  • Silicon-based gap-coupled direct millimeter-wave signal detection instrument
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  • Silicon-based gap-coupled direct millimeter-wave signal detection instrument

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Embodiment Construction

[0033] specific implementation plan

[0034] The sensor part of the silicon-based gap-coupled direct millimeter-wave signal detection instrument of the present invention is based on a high-resistance Si substrate 1, which consists of a coplanar waveguide 3, a No. 1 slot coupling structure 7-1, and a No. 2 slot. Coupling structure 7-2, No. 3 slot coupling structure 7-3, No. 4 slot coupling structure 7-4, phase shifter 8, No. 1 SPDT switch 23, No. 2 SPDT switch 24, a Wilkinson power divider , three Wilkinson power combiners and six direct thermoelectric power sensors.

[0035] SPDT switch 23 is made up of coplanar waveguide 3, anchor region 26, Si3N4 dielectric layer 20, switch pull-down electrode plate 27 and switch beam 25, coplanar waveguide 3 is connected on the anchor region 26, anchor region 26 and two The switch beams 25 on different branches are connected, one of which is connected to the direct thermoelectric power sensor, and the other branch is connected to the input...

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Abstract

The invention relates to a silicon-based slot-coupled direct type millimeter wave signal detecting instrument, comprising three large modules, including a sensor, an analog-digital converter, an MCS51 single-chip microcomputer, and a liquid crystal display; the sensor is composed of a coplanar waveguide, slot coupling structures, a phase shifter, a single-pole double-throw switch, a Wilkinson power divider, a Wilkinson power combiner and a direct type thermoelectric power sensor; the silicon-based slot-coupled direct millimeter wave signal detecting instrument is manufactured on a high-resistance Si substrate; the two slot coupling structures above measure signal frequency, and the two slot coupling structures below measure signal phase; the Wilkinson powder divider and the Wilkinson power combiner are mainly composed of a coplanar waveguide, an asymmetric coplanar strip line, and an isolating resistor; the direct type thermoelectric power sensor is mainly composed of a coplanar waveguide, two thermocouples and a blocking capacitor. The analog-digital converter portion is composed of STM32 and AD620 peripheral circuits. The MCS51 single-chip microcomputer is used for formula computing; the liquid crystal display portion is composed of a liquid crystal display screen; these structures are simple and efficient, and the efficiency of the silicon-based slot-coupled direct type millimeter wave signal detecting instrument is improved greatly.

Description

technical field [0001] The invention provides a silicon-based gap-coupled direct millimeter-wave signal detection instrument, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Today's era is an era of increasingly profound development of information science and technology, and various electronic circuit technologies are emerging one after another. In the microwave field, the detection technology of various parameters of microwave signals is a science and technology that people need very much. The millimeter wave signal is an electromagnetic wave with a wavelength in the range of one to ten millimeters. It is in the area where microwaves and far-infrared waves overlap. Simply put, millimeter waves are the extension of microwaves to high frequencies or the development of light waves to low frequencies. In the past, people only Deep research is being done on microwaves and low-frequency signals below microwaves, but w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R23/02G01R21/133G01R25/00B81B7/00
CPCB81B7/0009G01R21/133G01R23/02G01R25/00
Inventor 廖小平褚晨蕾
Owner SOUTHEAST UNIV