Silicon-based gap-coupled direct millimeter-wave signal detection instrument
A signal detection, millimeter wave technology, applied in the direction of instruments, measuring devices, electric solid devices, etc., can solve the problems that restrict the development of signal detectors, and achieve the effect of improving detection efficiency
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[0034] The sensor part of the silicon-based gap-coupled direct millimeter-wave signal detection instrument of the present invention is based on a high-resistance Si substrate 1, which consists of a coplanar waveguide 3, a No. 1 slot coupling structure 7-1, and a No. 2 slot. Coupling structure 7-2, No. 3 slot coupling structure 7-3, No. 4 slot coupling structure 7-4, phase shifter 8, No. 1 SPDT switch 23, No. 2 SPDT switch 24, a Wilkinson power divider , three Wilkinson power combiners and six direct thermoelectric power sensors.
[0035] SPDT switch 23 is made up of coplanar waveguide 3, anchor region 26, Si3N4 dielectric layer 20, switch pull-down electrode plate 27 and switch beam 25, coplanar waveguide 3 is connected on the anchor region 26, anchor region 26 and two The switch beams 25 on different branches are connected, one of which is connected to the direct thermoelectric power sensor, and the other branch is connected to the input...
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