Micro fluxgate sensor

Abstract

The invention discloses a silicon carbide based integrated micro fluxgate sensor, which comprises a silicon carbide substrate, an excitation coil, a detection coil, a magnetic core, electrodes and silicon carbide films, and is characterized in that the rectangular magnetic core is located in a rectangular groove at the surface of the silicon carbide substrate, and the upper surface of the magnetic core is flush with the surface of the silicon carbide substrate; both the excitation coil and the detection coil are a micro electromechanical three-dimensional solenoid coil, bottom coils of the excitation coil and the detection coil are located in a microgroove array at the bottom of the rectangular groove, electrified wires of the bottom coils are insulated by the silicon carbide substrate at clearances of the microgroove array, and the bottom coils are insulated from the magnetic core through chemical vapor deposition silicon carbide films; top coils of the excitation coil and the detection coil are insulated from the magnetic core through the chemical vapor deposition silicon carbide films, and clearances of electrified wires of the top coils are filled and insulated by the chemical vapor deposition silicon carbide films; the surface of the sensor is covered by the chemical vapor deposition silicon carbide films and is isolated and protected from the air, and the electrodes are exposed via through holes.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a silicon carbide-based integrated miniaturized fluxgate sensor. Background technique [0002] As a traditional weak magnetic field detection device, the fluxgate sensor has always had its unique advantages and cannot be replaced by other magnetic field sensors. In recent years, it has continuously discovered its application potential in new fields, such as indoor geomagnetic positioning, missile inertia Guidance, small satellite attitude control, virtual reality motion detection, intelligent transportation, etc. In recent years, due to the need to measure the precise speed of specific components under high temperature and harsh environments, and the structure of the tested parts cannot be changed, and the space is limited, such as the measurement of the speed of gears in vehicle gearboxes or aircraft engines, often It is required that the magnetic sensor can withs...

AI Technical Summary

Problems solved by technology

Due to the need to punch through holes to wind the coil on the magnetic core during the manufacturing process, the sensor may be damaged during the pass, and the printed circuit board cannot withstand the high temperature environment

Also, it is difficult to reduce the size of the fluxgate sensor according to this method compared to MEMS technology

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