Microwave heating and plasma treating equipment
A microwave heating and processing equipment technology, applied in the field of ion processing, can solve the problems of poor material bonding, poor thermal conductivity, incoherent processing steps, etc., to meet the requirements of process temperature, shorten processing time, and achieve remarkable energy-saving effects Effect
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[0021] The present invention will be further described below in conjunction with accompanying drawing:
[0022] Such as figure 1 and figure 2 , the microwave heating and plasma treatment equipment of the present invention comprises equipment main body cabinet 11, plasma generator 9, microwave source module 12, microwave control cabinet 15 and microwave power supply cabinet 16, and the top inside equipment main cabinet 11 is provided with plasma generator 9. There are microwave source modules 12 on the front and rear sides, the left and right sides are cabinet doors, and the bottom surface is provided with a loading platform; and the inside of the equipment main cabinet 11 is equipped with a cooling device and a temperature sensing device; the plasma generating device 9 is electrically connected to the microwave source module 12. The microwave source module 12, the cooling device and the temperature sensing device are electrically connected to the microwave control cabinet 15...
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