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Thermal temperature difference type wind speed sensor and its preparation method and detection method

A wind speed sensor and wind speed detection technology, applied in the measurement of fluid speed using thermal variables, manufacturing microstructure devices, semiconductor/solid-state device components, etc. Through-substrate through-hole technology, solving lead problems, and the effect of easy industrial production

Active Publication Date: 2019-03-05
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this method achieves wind sensing from the front, it still needs to perforate the substrate, and it also needs to involve bonding wire technology, and there is still a certain complexity in the structure and manufacturing process.

Method used

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  • Thermal temperature difference type wind speed sensor and its preparation method and detection method
  • Thermal temperature difference type wind speed sensor and its preparation method and detection method
  • Thermal temperature difference type wind speed sensor and its preparation method and detection method

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Embodiment 1

[0037] Embodiment 1: see figure 1 , figure 2 and image 3 , the thermal temperature difference wind speed sensor and detection method thereof provided by the present invention, the wind speed sensor includes a glass substrate 1, a heating metal block 2, temperature sensing inductance coils 3 and 4, heating inductance coil 5, temperature measuring inductance coils 6 and 7.

[0038] Wherein, the thermal conductivity of the glass substrate 1 can be less than 10; of course, theoretically speaking, there is no requirement for the thermal conductivity of the substrate, but in order to improve the sensitivity, it is better to use glass.

[0039] The heating metal block 2 , that is, the heating element, grows on the center of the front surface of the glass substrate 1 , and generates heat by applying an alternating current to the heating inductive coil 5 .

[0040] The temperature-sensing inductance coils 3 and 4, that is, the temperature-sensing elements, grow on the front of the ...

Embodiment 2

[0043] Example 2: see Figure 4 , Figure 5 and Image 6 , The only difference from Example 1 is the temperature-sensing element, and the temperature-sensing element in Example 2 uses metal blocks, namely temperature-sensing metal blocks 3 and 4.

[0044] The preparation methods of Implementation 1 and 2 are also basically the same. combine Figure 7 , taking embodiment 1 as an example, the preparation process of the thermal temperature difference type wind speed sensor is as follows:

[0045] Pic 4-1 : prepare an insulating glass substrate;

[0046] Figure 4-2 : Spin-coat photoresist on the front of the glass substrate and cure it;

[0047] Figure 4-3 : Use photolithography technology to remove the photoresist on the front side that needs to grow the metal part, and sputter the metal material;

[0048] Figure 4-4 : Soak in acetone solution, peel off to form the heating metal block 2 on the front of the substrate, and the temperature-sensing inductance coils 3 an...

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Abstract

The invention discloses a thermal temperature difference type air speed sensor. The thermal temperature difference type air speed sensor is characterized by comprising a glass substrate, a heating element, at least two groups of temperature-sensing elements and two groups of temperature measurement elements, the heating element comprises a heating inductive coil and a heating metal block, and the heating inductive coil applies alternating current to enable the heating metal block to heat. The invention further discloses a manufacturing method of the thermal temperature difference type air speed sensor and an air speed detection method based on the thermal temperature difference type air speed sensor. The thermal temperature difference type air speed sensor of such structure has the advantages that air speed detection in a front air sensing mode is achieved, sensitivity of the air speed sensor is improved while power consumption is reduced, a bonding wire technology and a substrate through hole technology can be avoided, and the thermal temperature difference type air speed sensor is low in cost and easy for industrialized production.

Description

technical field [0001] The invention proposes a heat-temperature difference wind speed sensor based on passive wireless technology and a detection method thereof, belonging to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Wind speed detection is closely related to daily life, and plays a very important role in many fields such as industrial and agricultural production, energy development, transportation and tourism, weather forecast, and the Internet of Things. Because the traditional MEMS wind speed sensor cannot solve the problem of the front lead wire, most of them work by sensing the wind on the back side. Since the back side directly interacts with the wind field, the temperature difference between the upstream and downstream is greater than that of the front side, which leads to the sensitivity of the sensor. Not high, power consumption is too large. [0003] The patent application number 201410325164.1 discloses a three...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02B81C1/00G01P5/12
CPCB81B7/02B81B2201/02B81C1/00023G01P5/12
Inventor 易真翔董蕾王立峰秦明黄庆安
Owner SOUTHEAST UNIV