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Adsorption pad for tft thinning and polishing

A technology for thinning polishing and adsorption pads, applied in layered products, synthetic resin layered products, grinding tools, etc., can solve the problems of long hydrophobic chains, low water solubility, high surface activity, etc., to slow down rapid penetration and avoid The effect of high water absorption and excellent damping and anti-skid performance

Active Publication Date: 2018-06-19
ANHUI HECHEN NEW MATERIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, acryloyl bisquaternary ammonium salt has a long hydrophobic chain and high surface activity, and can be polymerized into a polymer surfactant at a certain temperature, making it have extremely high surface activity and low water solubility

Method used

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  • Adsorption pad for tft thinning and polishing
  • Adsorption pad for tft thinning and polishing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0062] An adsorption pad for TFT thinning and polishing, the adsorption pad is provided with release paper, double-sided tape, PET film, double-sided tape, fluorine-containing polyurethane porous film and protective film in sequence from bottom to top; the fluorine-containing polyurethane porous film From top to bottom are the surface adsorption layer 1, the first foam layer 2, the second foam layer 3, the third isolation layer 4 and the fourth foam layer 5, the surface adsorption layer 1 is a dense layer; the The first foamed layer 2 and the second foamed layer 3 are both water-drop-shaped porous structures, and the water-drop-shaped holes of the second foamed layer 3 are larger than the water-drop-shaped holes of the first foamed layer 2 .

[0063] The fourth foamed layer 5 is an oval porous structure with an average pore diameter of 200 μm, and the third isolation layer 4 is a reticulated pore structure formed by circular micropores with a pore diameter of 9-20 μm.

[0064]...

Embodiment 2

[0090] An adsorption pad for TFT thinning and polishing, the adsorption pad is provided with release paper, double-sided tape, PET film, double-sided tape, fluorine-containing polyurethane porous film and protective film in sequence from bottom to top; the fluorine-containing polyurethane porous film From top to bottom are the surface adsorption layer 1, the first foam layer 2, the second foam layer 3, the third isolation layer 4 and the fourth foam layer 5, the surface adsorption layer 1 is a dense layer; the The first foamed layer 2 and the second foamed layer 3 are both water-drop-shaped porous structures, and the water-drop-shaped holes of the second foamed layer 3 are larger than the water-drop-shaped holes of the first foamed layer 2 .

[0091] The fourth foamed layer 5 is an oval porous structure with an average pore diameter of 243 μm, and the third isolation layer 4 is a reticulated pore structure formed by circular micropores with a pore diameter of 4.2-17.8 μm.

[0...

Embodiment 3

[0118]An adsorption pad for TFT thinning and polishing, the adsorption pad is provided with release paper, double-sided tape, PET film, double-sided tape, fluorine-containing polyurethane porous film and protective film in sequence from bottom to top; the fluorine-containing polyurethane porous film From top to bottom are the surface adsorption layer 1, the first foam layer 2, the second foam layer 3, the third isolation layer 4 and the fourth foam layer 5, the surface adsorption layer 1 is a dense layer; the The first foamed layer 2 and the second foamed layer 3 are both water-drop-shaped porous structures, and the water-drop-shaped holes of the second foamed layer 3 are larger than the water-drop-shaped holes of the first foamed layer 2 .

[0119] The fourth foamed layer 5 is an oval porous structure with an average pore diameter of 205 μm, and the third isolation layer 4 is a reticulated pore structure formed by circular micropores with a pore diameter of 2-14.3 μm.

[0120...

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Abstract

The invention relates to an adsorption pad for TFT thinning and polishing. The adsorption pad is sequentially equipped with release paper, a double faced adhesive tape, a PET film, a double faced adhesive tape, a fluorinated polyurethane porous film and a protective film from bottom to top, wherein the fluorinated polyurethane porous film is sequentially equipped with a surface adsorption layer, a first foaming layer, a second foaming layer, a third isolating layer and a fourth foaming layer from top to bottom; the surface adsorption layer is a compact layer; both the first foaming layer and the second foaming layer are of water drop shaped porous structures; and water drop shaped holes of the second foaming layer are greater than those of the first foaming layer. The adsorption pad for TFT thinning and polishing provided by the invention has relatively high hydrophobicity, so that permeation of a polishing solution can be reduced, heat generated by friction of a polishing disc can be dissipated very well, and the service life of the grinding adsorption pad is 220-240 hours which is prolonged by 25-35 hours in comparison with the service life of an existing adsorption pad for TFT thinning and polishing prepared from polyurethane resin composition.

Description

technical field [0001] The invention belongs to the technical field of polymer materials and preparation thereof, and particularly relates to an adsorption pad for TFT thinning and polishing. Background technique [0002] The liquid crystal TFT display screen mainly adopts the method of chemical thinning at present, and its work flow includes chemical thinning, washing machine cleaning, polishing and grinding, cleaning after grinding, washing machine cleaning and other steps. With the development of technology, the grinding of super-ultra-thin TFT glass will become the mainstream, and grinding the upper and lower sheets will become a difficult problem. [0003] Before the TFT display screen is ground, it is necessary to place the TFT display screen on the surface of the adsorption pad of the grinding machine, put the TFT display screen into the grinding device, and grind the TFT display screen; The adsorption pad can realize the grinding of the TFT display screen, but the a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/22B24B37/24B32B7/06B32B27/08B32B27/36B32B27/40B32B33/00
CPCB24B37/22B24B37/24B32B7/06B32B27/08B32B27/36B32B27/40B32B33/00
Inventor 谭鸿李加海何成生李洁华
Owner ANHUI HECHEN NEW MATERIAL CO LTD
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