Integrated optic biochemical sensing chip based on limited drop resonance and manufacturing method thereof

Abstract

The invention discloses an integrated optic biochemical sensing chip based on limited drop resonance and a manufacturing method thereof. A buried optical waveguide, an optical input interface and an optical output interface are all buried in a substrate; a micro-flow channel is horizontally arranged on a substrate right above the buried optical waveguide; an inner chamber of the micro-flow channel is filled with a continuous phase; a drop generator is arranged at one end of the micro-flow channel; the drop generator is used for conveying the continuous phase and adding a dispersion phase for generating a limited drop; the limited drop flows under the coating of the continuous phase in the micro-flow channel; a signal light is inputted to the buried optical waveguide through the optical input interface; a transmission guide mode is formed in the buried optical waveguide; the guide mode is coupled with an echo wall resonant mode; the optical output interface is used for detecting the change in resonant wavelength of an output spectrum so as to acquire the change in characteristics of the limited drop. The integrated optic biochemical sensing chip provided by the invention has the advantages of easiness in manufacturing, liquid drop stability, high sensing sensitivity, low consumption of to-be-detected object and low cost.

Description

technical field [0001] The invention relates to an integrated optochemical sensing technology, in particular to an integrated optochemical sensing chip based on restricted droplet resonance and a manufacturing method thereof in the field of optical sensing devices. Background technique [0002] In recent years, due to the urgent technical needs in medical diagnosis, environmental monitoring, food safety, and anti-terrorism, research on low-cost, high-performance on-chip sensing chips is in the ascendant. Compared with other types of sensors, integrated optical sensors have the advantages of high sensitivity, miniaturization, high selectivity, anti-electromagnetic interference, and stable performance, especially in terms of low cost and low analyte consumption. received widespread attention. [0003] Integrated optical sensors mainly include three basic types: refractive index type, absorption type and fluorescence type. Among them, the refractive index sensor has the chara...

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Problems solved by technology

In addition, due to the limitations of the current technological level, the actually produced optical microcavity has a rough surface and large scattering loss, so the actual Q value is much lower than the designed Q value; , scattering and other effects will be further reduced, directly affecting the detection limit of the sensor

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