Corona discharging ion source assembly and ion implantation method thereof

Abstract

The invention discloses a corona discharging ion source assembly and an ion implantation method thereof. The corona discharging ion source assembly comprises an insulation sleeve, an ion generation cavity is constructed in the insulation sleeve, an opening communicated with the ion generation cavity is formed at a bottom end of the insulation sleeve, and the insulation sleeve is provided with an air supply channel communicated with the ion generation cavity; an ion reaction chamber, the ion reaction chamber is constructed by an insulation member, an ion reaction cavity is constructed in the ion reaction chamber, and the opening and the ion reaction cavity are communicated; a corona discharging needle assembly, the corona discharging needle assembly can be adjustably stretched into the ion generation cavity through an upper end of the insulation sleeve, and the corona discharging needle assembly and a corona discharging net are spaced; an ion implantation electrode, the ion implantation electrode is arranged on the ion reaction chamber, and the ion implantation electrode and the corona discharging net are spaced; and a controller, the controller is connected with a corona discharging high voltage power source and the ion implantation electrode. The corona discharging ion source assembly is advantaged in that valid ions are enhanced, an ion implantation rate is improved, and discharging is more stable.

Description

technical field [0001] The invention relates to the field of chemical analysis instruments, in particular to a corona discharge ion source assembly and an ion implantation method thereof. Background technique [0002] High Field Asymmetric Ion Mobility Spectrometry (FAIMS) is a method that works in an atmospheric pressure environment and uses the nonlinear motion of gas phase ions in a high electric field to detect trace (very small amount) substances. Technology. It is widely used in the detection of explosives, drugs, biochemicals and ion pre-separation. [0003] Corona discharge is a relatively stable form of electrical discharge. When a high but not breakdown voltage is applied across the electrodes, if the electric field (local electric field) on the electrode surface is strong, the gas medium near the electrodes will be partially broken down and corona discharge will occur. When the radius of curvature of the electrode is small, the field strength near it is particu...

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Problems solved by technology

Due to the small size of FAIMS, the combination of ion source and FAIMS needs to reduce the volume, and reducing the volume will lead to the reduction of discharge space, charge accumulation, prone to problems such as discharge instability, increase of discharge current and low ion implantation efficiency, which will lead to detection results Poor repeatability; in addition, the existing corona discharge ion source has a large volume and cannot be integrated with miniaturized and miniaturized FAIMS

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