Measuring device and method for measuring the deviation angle between the normal line of the light-transmitting surface of an electro-optic crystal and the z-axis

Abstract

The invention discloses an apparatus for measuring angle of divergence between a normal of light passing surface of electro-optical crystal and Z axis. The measuring apparatus includes a laser, a first lens, a space filter, a second lens, a polarizer, a third lens, a beam splitter, a digital optoelectronic inner focus autocollimator, a fourth lens, an analyzer, an imaging lens, a detector and a computer processing system. According to the invention, the theory of conoscopic interference is adopted to detect a to-be-measured electro-optical crystal in a non-contact and damage-free manner, such that the apparatus ensures no introduction of scratches on the surface of the to-be-measured electro-optical crystal in the course of the measured, and is suitable for detecting electro-optical crystals having large caliber. Also, according to the invention, the digital optoelectronic inner focus autocollimator is adopted to calibrate and detect the direction of the optical axis of a light beam, such that the apparatus guarantees that a detecting light beam is incident in the perpendicular direction to the to-be-measured electro-optical crystal, and the apparatus has the advantages of high measurement precision, excellent measurement repetitiveness and wide application value.

Description

technical field [0001] The invention relates to optical detection, in particular to a measuring device and a measuring method for the deviation angle between the normal line of the light-transmitting surface of an electro-optic crystal and the Z-axis. Background technique [0002] The high-power laser system adopts advanced multi-pass amplification technology to obtain high energy and improve efficiency, and the electro-optic switch of the large-aperture plasma electrode is one of the key components of this technology. damage to components and maintain system operation safety. The electro-optic switch crystal is manufactured by cutting perpendicular to its optical axis. With the increase of the fixed axis error, the optical energy loss increases rapidly. Therefore, the deviation angle error between the normal line of the light-passing surface of the electro-optic crystal and the Z-axis should be suppressed as much as possible. However, to suppress the angular error, accurat...

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Problems solved by technology

[0004] The invention proposes a measuring device and method for measuring the deviation angle between the normal line of the light-transmitting surface of the electro-optic crystal and the Z-axis, and a measuring method thereof, which realizes the non-destructive detection of the electro-optic crystal and overcomes the problems of easy scratches and large measurement errors in the existing methods

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