Non-contact electro-optic crystal light-transmitting surface normal and z-axis deviation angle measuring device and its measuring method

Abstract

The invention discloses an apparatus for non-contactmeasuring angle of divergence between a normal of light passing surface of electro-optical crystal and Z axis. The measuring apparatus includes a laser, a first lens, a space filter, a second lens, a polarizer, a beam splitter, a plane reflection mirror, a digital optoelectronic inner focus autocollimator, a third lens, a fourth lens, an analyzer, an imaging lens, a detector and a computer processing system. According to the invention, the theory of conoscopic interference is adopted to detect a to-be-measured electro-optical crystal in a non-contact and damage-free manner, such that the apparatus ensures no introduction of scratches on the surface of the to-be-measured electro-optical crystal in the course of the measured, and is suitable for detecting electro-optical crystals having large caliber. Also, according to the invention, the digital optoelectronic inner focus autocollimator is adopted to calibrate and detect the direction of the optical axis of a light beam, such that the apparatus guarantees that a detecting light beam is incident in the perpendicular direction to the to-be-measured electro-optical crystal, and the apparatus has the advantages of high measurement precision, excellent measurement repetitiveness and wide application value.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a non-contact electro-optic crystal light-transmitting surface normal line and a Z-axis deviation angle measurement device and a measurement method thereof. Background technique [0002] The high-power laser system adopts advanced multi-pass amplification technology to obtain high energy and improve efficiency, and the electro-optic switch of the large-aperture plasma electrode is one of the key components of this technology. damage to components and maintain system operation safety. The electro-optic switch crystal is manufactured by cutting perpendicular to its optical axis. With the increase of the fixed axis error, the optical energy loss increases rapidly. Therefore, the deviation angle error between the normal line of the light-passing surface of the electro-optic crystal and the Z-axis should be suppressed as much as possible. However, to suppress the angular error, accur...

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Problems solved by technology

[0004] The invention proposes a device for measuring the deviation angle between the normal line of the light-transmitting surface of the electro-optic crystal and the Z-axis and its measurement method, which realizes the non-destructive detection of the electro-optic crystal and overcomes the problems of easy scratches and large measurement errors in the existing methods

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