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Vibration and non-linear inhibition method for piezoelectric positioning device

A positioning device and non-linear technology, applied in the direction of electric controller, non-electric variable control, controller with specific characteristics, etc., can solve the problem that the feedforward adjustment method depends on modeling accuracy, etc., achieve simple structure and realize integrated control , Good effect of robustness

Active Publication Date: 2017-07-11
XI AN JIAOTONG UNIV
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Problems solved by technology

The accuracy of the feed-forward regulation method depends heavily on the modeling accuracy, while the feedback regulation can only provide limited compensation

Method used

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  • Vibration and non-linear inhibition method for piezoelectric positioning device
  • Vibration and non-linear inhibition method for piezoelectric positioning device
  • Vibration and non-linear inhibition method for piezoelectric positioning device

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Embodiment Construction

[0031] Preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings.

[0032] see Figure 1 to Figure 4 As shown, a vibration and nonlinear suppression method of a piezoelectric positioning device of the present invention comprises the following steps:

[0033] (1) Preprocessing the voltage signal of the input piezoelectric ceramic: segmentally optimizing the input triangular wave trajectory. The linear region remains unchanged, and the minimum acceleration criterion is used to smooth the waveform of the sharp point region of the signal waveform. On the basis of not changing the key characteristics of the signal, the suppression of high-order components in the frequency domain of the signal is realized.

[0034] (2) The dynamic modeling of the piezoelectric positioning device is carried out to obtain the system stiffness, damping, natural frequency and the open-loop transfer function between the input voltage and the ou...

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Abstract

The present invention discloses a vibration and non-linear inhibition method for a piezoelectric positioning device. The method comprises the following steps of (1) pre-processing a voltage signal input into the piezoelectric ceramics of the piezoelectric positioning device; (2) subjecting the piezoelectric positioning device to kinetic modeling and obtaining an open-loop transfer function among the key parameters of the piezoelectric positioning device, the input voltage and the output displacement; (3) conducting the closed-loop control of the piezoelectric positioning device based on the integral feedback method; (4) adopting a measurement value of a force sensor between the piezoelectric ceramics and a flexible hinge as a feedback quantity for realizing the feedback control of the piezoelectric positioning device, measuring the output displacement of the flexible hinge by a displacement sensor, and realizing the vibration and non-linear inhibition of the piezoelectric positioning device. According to the invention, the vibration inhibition and the non-linear inhibition are inhibited atr the same time without depending on the model modeling precision. Therefore, the requirements of the modern precision manufacture on the high precision and the high tracking performance of the piezoelectric positioning device can be met. The working efficiency is improved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical systems, in particular to a method for suppressing vibration and nonlinearity of a piezoelectric-driven displacement platform. Background technique [0002] Piezoelectric positioning devices are mechanical positioning devices driven by piezoelectric ceramics (PZT) that can provide nanoscale resolution. Piezoelectric positioning devices have the advantages of high rigidity, compact size, high displacement resolution, fast response and low power consumption, and have been widely used in precision positioning, nano-manufacturing systems, atomic force microscope scanning and optical testing and other fields. [0003] However, the positioning accuracy of piezoelectric positioning devices will be affected by PZT nonlinearity and mechanical vibration. Nonlinearities include hysteresis (occurring at large displacements) and creep effects (occurring at low frequency sweeps). The mechanical vibratio...

Claims

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Application Information

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IPC IPC(8): G05B11/42G05D19/02
CPCG05B11/42G05D19/02
Inventor 刘志刚张萌步明繁朱裕
Owner XI AN JIAOTONG UNIV
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