Mini-sized three-dimensional topography measurement system and mini-sized three-dimensional topography measurement method based on LED microscopic fringe projection

A fringe projection, three-dimensional topography technology, applied in the field of optical measurement, can solve the problems of complex method, difficult optical path adjustment, and reduced fringe contrast, and achieves the effects of low price, simple optical path adjustment, and suppression of the influence of coherent noise.

Inactive Publication Date: 2017-08-01
HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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Problems solved by technology

[0005] Although many scholars have proposed some methods to reduce the stripes projected by DLP projectors, these methods are relatively complicated

Method used

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  • Mini-sized three-dimensional topography measurement system and mini-sized three-dimensional topography measurement method based on LED microscopic fringe projection
  • Mini-sized three-dimensional topography measurement system and mini-sized three-dimensional topography measurement method based on LED microscopic fringe projection
  • Mini-sized three-dimensional topography measurement system and mini-sized three-dimensional topography measurement method based on LED microscopic fringe projection

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Embodiment Construction

[0036] The technical solution of the present invention will be further described below in conjunction with specific embodiments.

[0037] The light path of the implementation of the method for measuring the small three-dimensional shape based on low-coherence LED micro fringe projection of the present invention includes four parts: LED shear light path, phase shift interference light path, micro fringe projection light path, and image data collection light path. As attached figure 1 As shown, the microscopic three-dimensional topography measurement system based on low-coherence LED micro fringe projection of the present invention includes an LED light source 1, a lens 2, a pinhole filter 3, a lens 4, a polarizer 5, and a hard film interference filter 6. , Birefringent uniaxial crystal 7, collimating lens 8, 1 / 4 wave plate 9, analyzer 10, adjustable diaphragm 11, microscope objective lens 12, tested sample 13, double cemented lens 14, industrial camera 15.

[0038] System working pr...

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Abstract

The invention provides a mini-sized three-dimensional topography measurement system and a mini-sized three-dimensional topography measurement method based on LED microscopic fringe projection. A high contrast interference fringe can be generated by directly using a simple device, and weak coherent light (LED) is used as an illumination light source, and because a coherent length is short, interferences of scattered stray light of a light beam during a transmission process on a receiving screen are prevented, and therefore influences of coherent noises are inhibited, and vertical measurement precision of the system and the repeatability of the measurement are improved. A complicated optical path is not required for light beam compression, and the mini-sized three-dimensional topography can be measured directly. The fringe acquired by using LED shearing interferences has the high fringe contrast, and a price of an LED light source is cheap, and compared with a DLP projector, a cost of an optical measurement system is reduced, and then batch production is facilitated. The mini-sized three-dimensional topography measurement system and the mini-sized three-dimensional topography measurement method have advantages of simple optical path adjustment, cheap prices of adopted devices, easy popularization, and ability of acquiring high contrast fringe.

Description

Technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to a system and method for measuring microscopic three-dimensional shape based on low-coherence LED micro-stripe projection. Background technique [0002] With the development of science and technology and the continuous improvement of industrial manufacturing level, people have put forward new requirements for product processing and measurement. Traditional measurement methods have been difficult to meet the needs of modern measurement. Among the many measurement methods, the optical measurement method has the advantages of high accuracy, rapidity, and no damage, and has been widely used in various industries such as industrial inspection and virtual reality. Among the optical measurement methods, the measurement method based on fringe projection is widely used because of its non-contact, full-field, high-precision and other advantages. [0003] The existing measu...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 姚勇雷何兵刘昊鹏杨彦甫
Owner HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL
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