Mask plate or display motherboard and method of making cut marks on display motherboard
A technology of cutting marks and masks, which is applied to the photographic process of patterned surfaces, originals for photomechanical processing, and instruments. Cutting alignment accuracy and other issues, to achieve the effect of convenient measurement, improve yield, and ensure alignment accuracy
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Embodiment 1
[0029] Embodiment 1. The embodiment of the present invention provides a mask plate or a display motherboard. A cutting mark 10 is arranged on the mask plate or a display motherboard. The cutting mark 10 is as figure 2 What is shown includes: a first pattern 101 , a second pattern 103 and a straight marking line 102 ; wherein, the first pattern 101 and the second pattern 103 are symmetrical about the straight marking line 102 .
[0030] Exemplarily, when using the exposure process for pattern transfer, such as figure 2 The straight marking line shown on the corresponding mask plate is a hollow rectangle matching its size instead of a straight line. The reason is that if the straight marking line on the mask plate is designed as a straight line, after exposure, The area corresponding to the position of the straight marking line cannot be illuminated by light. After the etching process, there will be no marking line left on the display motherboard; therefore, it is necessary to...
Embodiment 2
[0032]Embodiment 2. The embodiment of the present invention provides a mask board or a display motherboard. A cutting mark 10 is arranged on the mask board or a display motherboard. The cutting mark 10 is as image 3 Shown include: the first pattern 101, the second pattern 103, the third pattern 104, the fourth pattern 105 and the straight marking line 102; the shape of the first pattern 101 and the second pattern 103 is a rectangle, and the long sides of the rectangle and The marking lines 102 are parallel; the third pattern 104 is located on the side of the first pattern away from the straight marking line 102; the fourth pattern 105 is located on the side of the second pattern away from the straight marking line 102; wherein, the first pattern 101, The second pattern 103 is symmetrical about the straight marking line 102 .
[0033] It should be noted that in the process of designing the cutting mark, the third pattern and the fourth pattern can be set as required; the cutti...
Embodiment 3
[0037] Embodiment 3. The embodiment of the present invention provides a mask plate or a display motherboard, and a cutting mark 10 is arranged on the mask plate or a display motherboard. The cutting mark 10 is as Figure 4 Shown includes: a first pattern 101, a second pattern 103, a straight marking line 102, and at least one set of fifth patterns 106 and sixth patterns 107 symmetrical to the straight marking line; wherein, the first pattern 101, the second The second pattern 103 is symmetrical about the straight marking line 102; the fifth pattern 106 is located on the side of the first pattern 101 away from the straight marking line 102, and the sixth pattern 107 is located on the side of the second pattern 103 away from the straight marking line 102. side.
[0038] It should be noted that at least one group is one group or more than two groups, and a group of fifth patterns and sixth patterns here refers to a type of pattern, that is, each group of fifth patterns and sixth ...
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