Air bearing supporting main beam system for dead-load type miniature force value standard device

Abstract

The invention discloses an air bearing supporting main beam system for a dead-load type miniature force value standard device, and the system comprises an air bearing, a main beam, a balance weight balancing mechanism, a balance fine tuning mechanism, gas clamping mechanisms, laser displacement sensors, and a substrate. The air bearing is fixed on the substrate, and the air bearing achieves the single-freedom-degree support for the main beam. The balance weight balancing mechanism is connected with one end of the main beam, and the balance fine tuning mechanism is connected with the central part of the main beam. The gas clamping mechanisms are symmetrically disposed at two sides of the main beam. The laser displacement sensors are symmetrically disposed on the substrate. The system provided by the invention reduces the frictional force, achieves the free rotation of the main axis direction, limits the freedom degrees of the main beam in other directions, eliminates the impact on a measurement result from a non-measurement-direction external force, guarantees the accurate positioning during weight loading and unloading, and reduces the measurement uncertainty of the dead-load type miniature force value standard device.

Description

technical field [0001] The invention relates to a force measuring balance system on a micro force value detection and calibration device, in particular to a system for supporting a main beam with an air bearing for a static weight micro force value standard device. Background technique [0002] In recent years, there has been an increasing demand for testing and calibration of small force values. With the rapid development of new materials, biology and other disciplines, a large number of small force measurements have been carried out in its scientific research and production. For example, in the process of testing the mechanical properties of thin films, microhardness, small satellite thrusters, etc., it is necessary to accurately test the small force value. The accuracy of the measurement of these small force values ​​directly affects the scientific research and production process, which puts forward high requirements for the calibration of small force values. [0003] T...

AI Technical Summary

Problems solved by technology

However, the friction force and eccentric error of the knife-edge support method are large, the sensitivity is low, and the degree of freedom between the knife and the knife support is large, which is not conducive to the accurate positioning of the weight of the static weight force value standard machine and the reproduction of small force values.

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