Numerical-controlled wet chemical etching combined nozzle for optical element machining

Abstract

The invention provides a numerical-controlled wet chemical etching combined nozzle for optical element machining. The numerical-controlled wet chemical etching combined nozzle comprises an outer nozzle barrel, an inner nozzle barrel and an ejection opening assembly which is located in the inner nozzle barrel and used for ejecting a chemical etching solution; the outer nozzle barrel and the inner nozzle barrel are each composed of a straight cylinder section and a special-shaped taper cylinder section, the outer nozzle barrel is connected with the inner nozzle barrel through an annular plate which serves as the barrel bottom of the outer nozzle barrel, ethanol vapor inlets are designed at the straight cylinder section of the outer nozzle barrel, an annular ejecting cavity used for ejecting ethanol vapor is formed between the inner wall face of the outer nozzle barrel and the outer wall face of the inner nozzle barrel, and an outlet of the annular ejecting cavity is shaped like a rectangle; the ejection opening assembly is composed of multiple ejection openings which are arranged in a line and a liquid inlet chamber which communicates with the ejection openings, and a chemical etching solution inlet is designed in the liquid inlet chamber; and the ejection opening assembly is arranged at the barrel bottom of the inner nozzle barrel through the liquid inlet chamber, and the ejection opening end face of the ejection opening assembly is higher than the outlet end face of the annular ejecting cavity. According to the combined nozzle, the machining efficiency for removing high-frequency errors, a surface destruction layer and a subsurface damage layer of an optical element can be improved.

Description

technical field [0001] The invention belongs to the technical field of numerical control chemical polishing, and in particular relates to a numerical control wet chemical etching combined nozzle for optical element processing. Background technique [0002] High-power laser systems have high requirements on the surface processing quality of optical components. Defects on the surface of optical components, processing residual errors and sub-surface damage will have a significant impact on the damage threshold of components. When laser light strikes the edges of sharp protrusions or pits on an optical element, intense scattering occurs, damaging the element. If the scattering occurs in the surface damage layer or the subsurface damage layer of the optical element, because the intensity of the surface damage layer and the subsurface damage layer is low, it is more likely to cause damage and damage the element. Therefore, it is necessary to remove the high-frequency error of the...

AI Technical Summary

Problems solved by technology

For example, if chemical etching is performed on a CCP (continuous phase plate) element with a size of 330×330 (mm), the total time is as much as 480 hours, and the processing efficiency is extremely low.

And because the CNC chemical polishing technology belongs to the micro-jet processing technology, the processing efficiency cannot be improved by increasing the jet pressure.

In addition, there are problems such as alignment deviation of the etching head during the processing process, which causes uneven processing and increases the waviness of the entire component

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