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Vacuum deposition device for imprint template

A technology of vacuum deposition and printing template, which is applied in the direction of vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the problems of poor uniformity and low efficiency, and achieve good quality, high work efficiency, film The effect of uniform thickness

Active Publication Date: 2017-09-01
SUZHOU GUANGDUO MICRO NANO DEVICE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The traditional film coating method is to directly apply on the imprint template, which has poor uniformity and low efficiency

Method used

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  • Vacuum deposition device for imprint template
  • Vacuum deposition device for imprint template
  • Vacuum deposition device for imprint template

Examples

Experimental program
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Embodiment Construction

[0031] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0032] To achieve the object of the present invention, in some embodiments of a vacuum deposition apparatus for an imprint template,

[0033] Such as figure 1 with 2 As shown, a vacuum deposition device for imprinting templates includes: a housing 1 and a vacuum assembly.

[0034] A sealed cavity 11 is provided on the housing 1, and an imprint template (not shown in the figure) is placed in the sealed cavity 11, and a drug interface 12 communicated with the sealed cavity is provided on the housing 1, and the gaseous FDTS enters the sealed cavity 11 from the drug interface 12 .

[0035] The vacuum assembly includes: a vacuum port 13 communicating with the sealed cavity 11 and a vacuum device (not shown in the figure) connected to the vacuum port 13 . During specific operation, a vacuum valve 2 will be installed at the vacuum port 13 .

[...

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PUM

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Abstract

The invention discloses a vacuum deposition device for an imprint template. The vacuum deposition device comprises a housing and a vacuumizing assembly, wherein a sealed cavity is formed in the housing; the imprint template is placed in the sealed cavity; a drug connector communicating with the sealed cavity is arranged on the housing; gaseous FDTS enters the sealed cavity via the drug connector; and the vacuumizing assembly comprises a vacuum connector communicating with the sealed cavity and a vacuumizing device connected with the vacuum connector. The vacuum deposition device for the imprint template is simple in structure and convenient to operate, and can effectively attach an FDTS film onto the surface of the imprint template, so that the surface energy of the imprint template is reduced, and the hydrophobicity of the imprint template is improved.

Description

technical field [0001] The invention relates to the field of micro-nano processing, in particular to a vacuum deposition device for imprinting templates. Background technique [0002] Nanoimprint technology is an important technology in the manufacturing process of micro-nano devices. Nanoimprint technology was first proposed by Professor Stephen Y Chou in 1995. It is a new pattern transfer technology different from traditional lithography technology. The definition of nanoimprint technology is: instead of using light or radiation to photosensitively shape the photoresist, it directly constructs nanometer-sized patterns on silicon substrates or other substrates using physical mechanisms. [0003] Soft template is a simple and convenient nano-imprint template replication material. It is usually made by mixing the body material and curing agent in a certain proportion. After removing air bubbles, it is poured on the surface of the imprint template (mother template) and cured i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/12C23C14/24C23C14/54
CPCC23C14/12C23C14/24C23C14/54
Inventor 史晓华
Owner SUZHOU GUANGDUO MICRO NANO DEVICE
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