Annular reflection waveguide grating filter and manufacturing method thereof

Abstract

The invention discloses an annular reflection waveguide grating filter and a manufacturing method thereof, and solves the problem that the present photon integration technology cannot perform single-chip integration of the circulator. The reflection waveguide grating filter comprises an input waveguide, an output waveguide and a waveguide grating. One end of the input waveguide comprises an input optical port, and the other end is connected with the waveguide grating. One end of the output waveguide and the input waveguide form an asymmetric directional coupler through a coupling section. The other end of the output waveguide comprises an output optical port. The waveguide grating is used for realizing mode conversion of the input light so as to generate the reflected light. The asymmetric directional coupler is used for realizing further mode conversion of the reflected light so as to generate the output light. The manufacturing method of the reflection waveguide grating filter comprises the steps that silicon-on-insulator waveguide material system filter is manufactured by using the electron beam exposure method. The invention also comprises a sampled grating manufacturing method. The circulator function can be realized so that effective use of the waveguide grating in the photonic integrated chip can be realized.

Description

technical field [0001] The invention relates to the technical field of optoelectronics, in particular to an annular reflective waveguide grating filter and a manufacturing method thereof. Background technique [0002] With the development of the Internet, photonic integration technology is the development trend in the field of optoelectronics. Photonic integration technology integrates multiple discrete optoelectronic chips on a single chip. Due to various reasons, the existing technology cannot monolithically integrate circulators, which leads to the inability of some functional components to be effectively integrated in traditional discrete devices, which limits the use of photonic integrated chips. For example, a fiber grating is a commonly used device in optical communication, and it is widely used in functions such as dispersion compensation, add-drop multiplexing, and optical signal processing. However, because the device is generally based on the reflected light resp...

AI Technical Summary

Problems solved by technology

[0003] The invention provides an annular reflective waveguide grating filter and its manufacturing method, which solves the problem that the existing photon integration technology cannot integrate the circulator in a single chip

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