Exposure machine and shading blade

Abstract

The invention provides an exposure machine and a masking blade. The exposure machine has the advantages that a vertical part of a first front masking blade is provided with an opening, the air can flow through the opening when the first front masking blade is moved, and the decreasing of air pressure between the first front masking blade and a light cover protecting film is reduced when the first front masking blade is moved, so that the scratching of the light cover protecting blade is avoided; masking plates are arranged at the top part and side part of the opening, so that the leakage of the ultraviolet light for exposure via the opening is avoided, the masking effect of the first front masking blade and the exposure effect of the exposure machine are guaranteed, and the abnormality of patterns is prevented.

Description

technical field [0001] The invention relates to the technical field of display manufacturing, in particular to an exposure machine and a shading blade. Background technique [0002] In the field of display technology, flat-panel displays such as Liquid Crystal Display (LCD) and Organic Light Emitting Diode (OLED) have gradually replaced CRT displays, and are widely used in LCD TVs, mobile phones, personal digital assistants, digital Cameras, computer or laptop screens, etc. [0003] In the manufacturing process of flat panel displays such as the Array process of liquid crystal displays, an exposure machine is often used to perform an exposure process to pattern the corresponding film layer. Existing exposure machines generally include: a photomask stage, a light source corresponding to the photomask stage, an amplifying optical path arranged under the photomask stage, a substrate stage arranged under the amplifying optical path, and a light source arranged under the photoma...

AI Technical Summary

Problems solved by technology

Since the bottom of the photomask protection film 400 is extremely small (usually 3mm) from the top of the first front shading blade 101 and the first rear shading blade 102, it is possible to It will cause the air pressure between the photomask protection film 400 and the first front shading blade 101 and the first rear shading blade 102 to decrease, thereby causing the photomask protection film 400 to bend downwards and rub against the first front shading blade 101 and the first rear shading blade 102. The top of the first rear light-shielding blade 102 causes damage to the mask protection film 400 and affects the quality of the exposure process

Especially when the exposure machine performs mask OPAF sensor calibration (mask OPAF sensor calibration), the first front shading blade 101 needs to move quickly to one side of the first rear shading blade 102, and this large-scale rapid movement The resulting drop in air pressure is large, and the downward bending of the photomask protective film 400 is also more serious, and the risk of scratches is also greater

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