Arc ion plating equipment for inner wall coating of deposition tube

An arc ion plating and deposition tube technology, applied in ion implantation plating, coating, metal material coating process and other directions, can solve the problem of not being able to obtain a continuous and uniform film, and achieve easy processing, good film quality, cooling The effect of low water temperature

Active Publication Date: 2017-10-03
曲士广 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] For arc ion plating to deposit the coating on the inner wall of the tube, the difficulty mainly lies in that because the nozzle with a smaller diameter has a shielding effect on the plasma, the concentration of the plasma ejected from the cathode arc source in the cavity inside the tube increases with the increase of the tube depth. Gradually decreased, unable to obtain a continuous and uniform film

Method used

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  • Arc ion plating equipment for inner wall coating of deposition tube
  • Arc ion plating equipment for inner wall coating of deposition tube
  • Arc ion plating equipment for inner wall coating of deposition tube

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Embodiment

[0031] In this embodiment, the pure copper coating is deposited on the inner wall of the Φ30×100mm stainless steel pipe, and the specific steps are as follows:

[0032] Step 1. According to the structure of the present invention, the arc ion plating deposition tube inner wall coating technology requires a copper tube with a certain diameter as the arc ion plating tubular copper target source. On the tubular vacuum arc ion plating equipment, make two insulating and sealing flanges connected with the vacuum chamber and the copper target, and assemble as follows figure 1 In the connection shown, the permanent magnets are distributed in the copper tube, that is, the plasma focuses the magnetic field. The two ends of the copper pipe are connected to the ring water and the DC power supply, and the plasma arc ignition adopts the insulation rotation trigger method.

[0033] Step 2. The outer wall of the vacuum chamber tube is connected to the positive pole of the DC power supply, the...

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Abstract

The invention belongs to the field of deposition of an inner wall film of a tube, and particularly relates to arc ion plating equipment for an inner wall coating of a deposition tube. The equipment comprises a tubular plasma target material arranged in a vacuum chamber, tubular vacuum focusing permanent magnets and a plasma arc initiation device, wherein two ends of the tubular plasma target material are connected with a vacuum chamber casing through an insulated sealing flange; the tubular plasma target material is sleeved with a tubular workpiece in a non-contact manner; two groups or more of tubular vacuum focusing permanent magnets are arranged in a reverse magnetic pole sequence in a tube direction in the tubular plasma target material, perform focusing control on distributed arc and ionize an arc target material. Negative ions of a coating material can be introduced into the deeper region of the inner wall of the tube. According to the arc ion plating equipment for the inner wall coating of the deposition tube, the problems that the inner wall of the arc ion plating deep deposition tube is not deep enough and the coating is not uniform are solved, a design idea which is simple to realize, low in cost and easy to implement is proposed on the basis of an existing arc ion plating technology, and the application range of the arc ion plating technology in the aspect of the inner wall of the deposition tube is extended.

Description

technical field [0001] The invention belongs to the field of thin film deposition on the inner wall of a pipe, in particular to an arc ion plating equipment for depositing a coating on the inner wall of a pipe. Background technique [0002] Arc ion plating (AIP) is a relatively new technology of physical vapor deposition (PVD) thin film (also known as vacuum arc evaporation, multi-arc ion plating). With the advantages of fast speed, it is widely used in machinery industry, metallurgy, high temperature protection, decorative materials, etc. [0003] The basic components of arc ion plating include vacuum coating chamber, cathode arc source, workpiece, vacuum system, etc. The technical principle of arc ion plating is mainly based on the cold cathode vacuum discharge theory. The metal plasma generated by the cathode arc source automatically maintains the arc discharge between the cathode and the coating chamber, and the current density of the arc spot can reach 105-107A / cm2. T...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): C23C14/32C23C14/04
CPCC23C14/046C23C14/325
Inventor华伟刚曲士广
Owner曲士广