Capacitive micromechanical band-pass filter with double elliptical plates

A band-pass filter and double ellipse technology, applied in electrical components, impedance networks, etc., can solve problems such as small motion impedance, increased process complexity, low frequency stability and repeatability, and achieve short response time and excellent mechanical Effects of electrical performance and production cost reduction

Inactive Publication Date: 2017-10-13
HANGZHOU DIANZI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The piezoelectric resonator electromechanical has a small motion impedance and is easy to match the RF circuit, but the piezoelectric driving method needs to use the piezoelectric characteristics of the material when driving, and the frequency stability and repeatability are low, and it is also difficult for piezoelectric materials. requirements, increasing the complexity of the process

Method used

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  • Capacitive micromechanical band-pass filter with double elliptical plates
  • Capacitive micromechanical band-pass filter with double elliptical plates

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with the accompanying drawings and implementation examples.

[0017] exist figure 1 Among them, the vibrating elliptical disks 1.1 and 1.2 are suspended on the substrate 14, and the anchor points 6.1 and 6.2 of the elliptical disks at the center of the bottom surface are supported to isolate them from the substrate 14. The vibrating elliptical disk 1.1 is surrounded by the input electrode 2.1, and the elliptical disk 1.2 is surrounded by the output electrode 2.2. 3.1 is the interval between the input electrode and the elliptical disk, and 3.2 is the interval between the output electrode and the elliptical disk. A coupling beam 7 connects the oval disks 1.1 and 1.2. The AC voltage solder joint 4.1 is introduced above the input electrode 2.1, one end of the AC voltage signal 10 is grounded 12.1, the other end is connected to the input resistor 8 through a metal wire 11.1, and the other end of the resist...

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Abstract

The invention discloses a capacitive double ellipse disc micromechanical band-pass filter, which includes a mechanical part and an electrical part. The structure of the mechanical part is symmetrical, including two vibrating elliptical disks of identical size, coupling beams, input electrodes, output electrodes, two anchor points of elliptical disks of identical size and an insulating bottom layer; the electrical part includes AC voltage source, input terminal resistance, Load resistor, ground. The two vibrating elliptical disks are connected through a coupling beam arranged at the outer joint of the long axis of the elliptical disks, and the input and output electrodes surround the two vibrating elliptical disks respectively to form a capacitive transducer resonator. The invention adopts two completely identical elliptical disc resonators to form a capacitive micro-machine band-pass filter through the coupling of coupling beams, which has small volume and weight, high resonance frequency and short response time. The bandwidth of the filter can be changed by adjusting the coupling beam; the working center frequency of the filter can be changed by adjusting the gap between the elliptical disc and the electrode or the size of the elliptical disc.

Description

technical field [0001] The invention relates to a micro-mechanical MEMS filter structure, which belongs to the technical field of components in the technical field of radio frequency communication and micro-electromechanical systems (MEMS), and specifically relates to a filter structure coupled by two identical capacitive elliptical disk resonators. Micromechanical bandpass filter. Background technique [0002] MEMS is the abbreviation of Microelectro Mechanical Systems (Microelectro Mechanical Systems), which combines the dual characteristics of machinery and electricity, integrates microelectronics technology and precision machining technology, and is used to develop miniaturized and intelligent products. Another revolution in the application of technology. The RF-MEMS micromechanical filter used in the field of radio frequency communication is a special filter made of MEMS technology and selected based on the natural resonance frequency of mechanical vibration. It combin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/05H03H9/46
CPCH03H9/02377H03H9/0547H03H9/467
Inventor 任灵
Owner HANGZHOU DIANZI UNIV
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