Sub-wavelength circularly polarized light analyzer containing Archimedes spiral and preparation method thereof
An Archimedes spiral, circularly polarized light technology, applied in the measurement of light polarization, optomechanical equipment, microlithography exposure equipment, etc. The effect of easy production, low time cost and great application value
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Embodiment 1
[0028] Embodiment one: see attached figure 1 As shown, a sub-wavelength circularly polarized light analyzer structural unit containing Archimedes helix, including a silicon dioxide substrate 1, a two-dimensional Archimedes helix structural unit arranged on the silicon dioxide substrate 2 and a gold film layer 3 covering the surface of the silicon dioxide substrate and the two-dimensional Archimedes spiral. A sub-wavelength circularly polarized light analyzer with Archimedes helix is obtained by combining multiple structural unit arrays.
[0029] See attached figure 2 , is a schematic diagram of the front-view structure of the structural unit of the sub-wavelength circularly polarized light analyzer containing the Archimedes helix, where the helix height of the two-dimensional Archimedes helix is H 1=0.1um, the gold film thickness is H 2 =0.05um.
[0030] See attached image 3 As shown, it is a schematic diagram of the top view structure of a sub-wavelength circularly...
Embodiment 2
[0038] In this embodiment, the substrate is magnesium fluoride, and the metal is silver; the helix height of the two-dimensional Archimedes spiral is H 1 =0.1um, the gold film thickness is H 2 =0.05um, the number of turns of the two-dimensional Archimedes spiral is N=3, and the starting radius is r 0 =0.15um, the helix pitch L is 0.3um, the helix width w is 0.2um, and the period P of each structural unit is 2.6um. A sub-wavelength circularly polarized light analyzer containing an Archimedes helix can be obtained by combining multiple structural units.
[0039] attached Figure 6 It is the transmittance curve diagram of the left and right circularly polarized light incident through the above-mentioned sub-wavelength circularly polarized light analyzer containing the Archimedes helix from the magnesium fluoride substrate; Figure 7 It is the circular dichroism curve diagram of left and right circularly polarized light incident from the substrate and passing through the above-...
Embodiment 3
[0041] In this embodiment, the substrate is silicon dioxide, and the metal is aluminum; the helix height of the two-dimensional Archimedes spiral is H 1 =0.1um, the gold film thickness is H 2 =0.05um, the number of turns of the two-dimensional Archimedes spiral is N=3, and the starting radius is r 0 =0.15um, the helix pitch L is 0.3um, the helix width w is 0.2um, and the period P of each structural unit is 2.6um. A sub-wavelength circularly polarized light analyzer based on the Archimedes helix is obtained by combining multiple structural units.
[0042] attached Figure 8 It is the transmittance curve graph of the left and right circularly polarized light incident through the above-mentioned sub-wavelength circularly polarized light analyzer based on the Archimedes helix from the magnesium fluoride substrate; Figure 9 It is the circular dichroism curve diagram of left and right circularly polarized light incident from the substrate and passing through the above-mentione...
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