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High-throughput processing device and method for metal surfaces through spatial and temporal focusing on femtosecond laser

A femtosecond laser, metal surface technology, used in metal processing equipment, laser welding equipment, manufacturing tools, etc., can solve problems affecting the processing quality of material surface structure

Active Publication Date: 2017-11-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

At present, this method of loosely focusing femtosecond laser pulses is prone to self-focusing and forming filaments before reaching the geometric focus, which seriously affects the processing quality of the material surface structure.

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  • High-throughput processing device and method for metal surfaces through spatial and temporal focusing on femtosecond laser
  • High-throughput processing device and method for metal surfaces through spatial and temporal focusing on femtosecond laser

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Embodiment Construction

[0019] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0020] see figure 1 , figure 1 It is the optical path diagram of the specific implementation of the femtosecond laser space-time focusing metal surface high-throughput processing device of the present invention. It can be seen from the figure that the femtosecond laser space-time focusing metal surface high-throughput processing device of the present invention includes four parts: beam reduction, spatial dispersion, focusing processing and imaging monitoring:

[0021] The beam shrinking part is composed of a stretcher 1, an amplifier 2, a convex lens 3 and a concave lens 4 placed sequentially along the optical path of the femtosecond laser pulse, and the femtosecond laser pulse emitted by the stretcher 1 and the amplifier 2 passes through the convex lens After 3 and the c...

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Abstract

The invention discloses a high-throughput processing device and method for metal surfaces through spatial and temporal focusing on femtosecond laser. According to the core of the method, spatial shaping is carried out on femtosecond laser pulse by utilizing a spatial and temporal focusing technique; a femtosecond laser focusing spot is controlled to realize a large size and air ionization is effectively avoided; and high-throughput structure processing on the surface of a metal material is realized. Compared with a common spatial focusing method, the method has the advantages that the nonlinear self-focusing effect of a femtosecond laser beam at focus can be effectively inhibited through the interaction between the femtosecond laser pulse after being subjected to spatial and temporal focusing shaping and the material, so that the influence of nonlinear processes such as self focusing, photo ionization and the like on the surface structure processing quality of the metal material is avoided. The processing device and method disclosed by the invention have the characteristics of being simple, effective and high in speed, are capable of realizing high-throughput fine structure processing and have an important potential application value in the fields of laser surface processing and marking and the like.

Description

technical field [0001] The invention relates to femtosecond laser metal surface processing, in particular to a femtosecond laser spatiotemporal focusing metal surface high-throughput processing device and method. Background technique [0002] Laser surface structure preparation is one of the important applications of laser material processing. Its advantages lie in the ultra-short pulse duration and ultra-high peak intensity of femtosecond laser pulses, which enable femtosecond laser micromachining to achieve surface structures with high precision and low thermal diffusion. In recent years, with the rapid development of femtosecond laser material processing, femtosecond laser surface structure preparation can achieve high-quality removal of almost all material surfaces (Vorobyev A Y, Guo C. Laser & Photonics Reviews, 7, 3, 2013), has become a An extremely attractive means of processing. However, in industrial production, the method of point-by-point direct laser writing wil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/352B23K26/046
CPCB23K26/046B23K26/352
Inventor 程亚谭远鑫储蔚林锦添廖洋
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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