Micro-hemispheric resonant gyroscope with precise control of internal and external electrode gap and its processing method

Abstract

The invention discloses a micro-hemisphere resonance gyroscope capable of precisely controlling gap between inner and outer electrodes. The micro-hemisphere resonance gyroscope comprises a glass substrate, a glass cover cap, a sealing wall, a polycrystalline silicon micro-hemisphere resonator, a reference electrode, eight suspended inner electrodes, eight first support handles, eight support columns, sixteen outer electrodes, annular electrodes, a first electrode hole, eight second electrode holes, sixteen third electrode holes and a fourth electrode hole. The micro-hemisphere resonance gyroscope has the advantages that by combining the inner and outer electrodes and the annular electrodes, the micro-hemisphere resonance gyroscope is suitable for a control circuit in a full-angle mode, and the accuracy and the range of the gyroscope measuring are increased; by utilizing the processing technology of fine electrodes, the gap between the electrodes can be precisely controlled, the capacitance of each electrode is increased, and the efficiency in driving and the sensitivity in measuring are improved; the wafer-level vacuum packaging of the gyroscope is realized, the property is excellent, and the larger application potential is realized in the high-precision attitude angle measuring.

Description

technical field [0001] The invention relates to the field of micro-electromechanical and inertial navigation, in particular to a micro-hemispheric resonant gyroscope with precisely controlled internal and external electrode gaps and a processing method thereof. Background technique [0002] The hemispherical resonant gyroscope is a gyroscope that uses the standing wave precession effect of the lip of the hemispherical resonator to sense the rotation of the base. The hemispherical resonant gyroscope composed of hemispherical shell resonators has no high-speed rotating parts, and the stability of the material And the symmetry of the structure makes it have many outstanding advantages, and it is the Coriolis vibrating gyroscope with the highest precision at present. [0003] At present, the performance of MEMS (micro-electromechanical systems) gyroscopes restricts its application in some occasions with high precision requirements. Therefore, by combining the advantages of hemis...

AI Technical Summary

Problems solved by technology

Integral processing means that the microhemispherical shell resonator and electrodes are processed on the same silicon wafer. It is integrally formed with high precision and avoids assembly errors, but the process is more complicated; the assembled processing scheme means that the microhemispherical resonator and electrodes are separated. Processing, and then assemble the two into one, the process flow is relatively simplified, but there are assembly errors

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