Electromagnetic diaphragm type on-demand microdroplet preparation apparatus

Abstract

The invention discloses an electromagnetic diaphragm type on-demand microdroplet preparation apparatus and relates to a microdroplet jetting apparatus. A cavity above a diaphragm is filled with liquid metal solution (with melting point being -19 DEGC), and under actions of a constant magnetic field and periodically changing current, periodically the changing electromagnetic force generated above the diaphragm drives a fluid, namely the liquid metal in the cavity to break into microdroplets at a nozzle periodically. The microdroplet jetting apparatus is characterized in that a diaphragm driving unit and a jetting cavity containing solution to be driven are adjacently arranged in the main cavity, and the diaphragm is driven to move by the electromagnetic force applied to the liquid metal, and the apparatus is provided with permanent magnets, the driving unit, the diaphragm, a storage cavity, a signal source, a power amplifier, an upper cover plate connected with a guide pipe and a lower cover plate with the nozzle. A driving cavity is fixed between the permanent magnets, electrodes are arranged inside the driving cavity to guarantee uniform distribution of current, and the signal source and a power amplifier generate various variable driving electric signals.

Description

technical field [0001] The invention relates to a micro-injection device, in particular to an electromagnetic diaphragm type on-demand micro-drop preparation device and method. Background technique [0002] Microelectronic device packaging and semiconductor chip fabrication are two important parts of microelectronics engineering. With the development of electronic packaging technology, the electronic packaging technology needs more and more micro-jet technology with controllable size. Micro-liquid injection technology is widely used in chip packaging, 3D printing and other technologies. This technology accurately distributes liquid metal in a controllable manner on demand to achieve mechanical or electrical connections between components. Promising precision direct-write additive manufacturing technology. [0003] At present, the micro-injection devices in the spray-on-demand mode mainly include piezoelectric drive, pneumatic diaphragm drive, and electromagnetic drive. Ch...

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Problems solved by technology

Chinese patent CN200610138558.1 discloses an air pressure pulse type droplet drive preparation system on demand, and the device prepares droplets with a low frequency

Chinese patent CN103212516A discloses an ampere force-driven microspray device, which is only suitable for the preparation of conductive metal solution droplets

Chinese patent CN103203294A discloses an electromagnetic microspray device, which is difficult to realize the preparation of droplets of non-conductive liquid, which greatly limits the rapid application and development of this technology

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