A method for identifying defects of flexible display substrates based on aoi

Abstract

The invention provides a defect discrimination method of a flexible display substrate based on the AOI. The method comprises steps of carrying out gray-scale value processing on a gray-scale image of a to-be-discriminated defective part obtained through scanning of the AOI; replacing a marking frame around the to-be-discriminated defective part by use of the mean value method; by use of methods of vector multiplying, data calculus substitution, graph making and the like, obtaining a series of judgment factors; by use of experience rule obtained through manual judgment, distinguishing the judgment factors and finding out the corresponding relation between the quantity values of the judgment factors and the substrate defects; and based on the verification, determining a threshold of the judgment factors, and then finishing image processing and process mapping of type judgment of the to-be-discriminated defect.

Description

technical field [0001] The invention belongs to the field of preparation of flexible display devices, in particular to the preparation of AMOLED screens. Background technique [0002] For flexible display devices, especially AMOLED screens, bubbles and foreign matter introduced during the coating, curing and subsequent deposition of the upper inorganic thin film on the flexible display substrate will cause great trouble to the subsequent manufacturing process. In particular, the introduction of air bubbles and foreign matter can easily cause holes or depressions in the inorganic layer during the laser crystallization (ELA) process after depositing the buffer layer and the active layer (a-Si). Such perforations or depressions are likely to cause device failure in the subsequent high-temperature process, and also cause serious pollution to the process equipment. Therefore, it is very necessary to monitor the existence of air bubbles and foreign matter and their respective sta...

AI Technical Summary

Problems solved by technology

[0003] Previously, automatic optical inspection (AOI) could effectively distinguish various defects on glass substrates, inorganic film layers, metal film layers, and organic photoresists, but scanning and distinguishing foreign objects on the surface of flexible display substrates , especially for the detection of air bubbles and particles of different shapes, it is not accurate enough and the repeatability is poor

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