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AlCrSiCuN nano multilayer coating and preparation method thereof

A nano-composite coating and coating technology, applied in the field of tool coating and its preparation, AlCrSiCuN nano-multilayer tool coating and its preparation, to achieve the effects of high reliability, high precision and high feed speed

Active Publication Date: 2017-12-29
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Adding Cu element to AlCrSiN coating to form AlCrSiN/Cu nan

Method used

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  • AlCrSiCuN nano multilayer coating and preparation method thereof
  • AlCrSiCuN nano multilayer coating and preparation method thereof
  • AlCrSiCuN nano multilayer coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0024] A kind of AlCrSiCuN nanocomposite cutting tool coating, is made up of the composition of following atomic percentage:

[0025] Al: 23.92 at. % Cr: 12.93 at. % Si: 8.02 at. % Cu: 0.91 at. % N: 54.21 at. %.

[0026] Put the samples into ultrasonic containers with absolute ethanol and acetone solution and clean them for 15 minutes respectively. After cleaning, dry the samples with general nitrogen and place them on the substrate holder in the cavity. Adjust the rotating speed of the workpiece support to 2.5rpm. Evacuate to a background vacuum of 5×10-3Pa, turn on the heater at the same time, heat the furnace chamber to 350°C; pass in 200sccm argon, adjust the air pressure to 1.2Pa, and apply a negative bias voltage of 1000V to the substrate for glow discharge cleaning , the cleaning time is 10min, which increases the cleanliness of the substrate surface and improves the bonding energy between the coating and the substrate; a negative bias voltage of 800V is applied to the ...

Embodiment 2

[0028] A kind of AlCrSiCuN nanocomposite cutting tool coating, is made up of the composition of following atomic percentage:

[0029] Al: 24.20 at. % Cr: 12.51 at. % Si: 8.00 at. % Cu: 2.61 at. % N: 52.68 at. %.

[0030] Put the samples into ultrasonic containers with absolute ethanol and acetone solution and clean them for 15 minutes respectively. After cleaning, dry the samples with general nitrogen and place them on the substrate holder in the cavity. Adjust the rotating speed of the workpiece support to 2.5rpm. Evacuate to a background vacuum of 5×10-3Pa, turn on the heater at the same time, heat the furnace chamber to 350°C; pass in 200sccm argon, adjust the air pressure to 1.2Pa, and apply a negative bias voltage of 1000V to the substrate for glow discharge cleaning , the cleaning time is 10min, which increases the cleanliness of the substrate surface and improves the bonding energy between the coating and the substrate; a negative bias voltage of 800V is applied to the ...

Embodiment 3

[0032] A kind of AlCrSiCuN nanocomposite cutting tool coating, is made up of the composition of following atomic percentage:

[0033]Al: 22.88 at. % Cr: 12.48 at. % Si: 7.75 at. % Cu: 3.72 at. % N: 53.17 at. %.

[0034] Put the samples into ultrasonic containers with absolute ethanol and acetone solution and clean them for 15 minutes respectively. After cleaning, dry the samples with general nitrogen and place them on the substrate holder in the cavity. Adjust the rotating speed of the workpiece support to 2.5rpm. Evacuate to a background vacuum of 5×10-3Pa, turn on the heater at the same time, heat the furnace chamber to 350°C; pass in 200sccm argon, adjust the air pressure to 1.2Pa, and apply a negative bias voltage of 1000V to the substrate for glow discharge cleaning , the cleaning time is 10min, which increases the cleanliness of the substrate surface and improves the bonding energy between the coating and the substrate; a negative bias voltage of 800V is applied to the s...

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Abstract

The invention relates to an AlCrSiCuN nano-composite cutter coating and a preparation method thereof and belongs to the technical field of thin film materials. The AlCrSiCuN nano-composite cutter coating comprises the following components of 18-29 at.% of Al, 19-30 at.% of Cr, 6-9 at.% of Si, 0-12 at.% of Cu and 46-55 at.% of N. According to the preparation method of the AlCrSiCuN nano-composite cutter coating, the surface of a hard alloy cutter is coated with the AlCrSiCuN nano-composite cutter coating through the cathodic arc ion plating technology and the high-power pulse magnetron sputtering (HIPPIMS) technology. The AlCrSiCuN cutter nano-composite coating is prepared by introducing the Cu element, and thus the purpose of promoting performance is achieved. The AlCrSiCuN nano-composite cutter coating has high hardness, has the low friction coefficient, high toughness and excellent dry cutting perfromance at the high temperature and has important application prospects in the field of high-speed cutting and surface protection.

Description

technical field [0001] The invention relates to a tool coating and a preparation method thereof, in particular to an AlCrSiCuN nanometer multilayer tool coating and a preparation method thereof, belonging to the technical field of thin film materials. Background technique [0002] Surface coating technology has become a key technology in the field of cutting tools, which plays a vital role in the improvement of tool performance and the progress of processing technology. TiN coating is considered as an ideal wear-resistant coating and is applied to many machine parts that require wear resistance, but TiN coating forms local high temperature conditions at higher temperatures (above 550°C) or during high-speed cutting Under this condition, it will cause local oxidation on the surface of TiN coating to form loose TiO2. At present, there are multi-element multi-component coatings formed by adding elements such as Cr and Al to TiN coatings, such as TiCrN and TiAlN coatings, whose...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32C23C14/35
Inventor 王启民费加喜代伟吴正涛
Owner GUANGDONG UNIV OF TECH
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