78results about How to "Improve the binding force of membrane base" patented technology

The invention discloses a preparation method of a photovoltaic glass surface antireflection film, which is characterized by comprising the following steps of firstly, preparing inorganic-organic hybrid silicasol; secondly, coating; thirdly, hydrophobic treatment; and fourthly, solidification treatment. Compared with the prior art, the invention has the advantages that the film-substrate cohesion between an antireflection film and substrate photovoltaic glass is stronger, and therefore, the wiping resistance of the coated photovoltaic glass surface antireflection film is enhanced; a layer of hydrophobic group with low surface energy is formed on the surface of the antireflection film, and therefore, the corrosion of moisture to a film microstructure is reduced, and the long service life of the coated photovoltaic glass is ensured; and the invention has low whole process cost and simple technical route and is suitable for industrial and large-scale application.

The invention relates to a fuel cell metal bipolar plate with the conductive and anti-corrosion plating and a preparation method thereof. Chromium-nitrogen-carbon ternary composite step plating is formed on the surface of the metal bipolar plate by using a closed field unbalanced magnetron sputtering technology, and a pure chromium base layer, a chromium nitride transition layer, a chromium-carbon-nitrogen coexistence layer and an amorphous carbon layer are arranged upwards successively on the surface of the metal bipolar plate. Compared with the prior art, the fuel cell metal bipolar plate with the conductive and anti-corrosion plating and the preparation method thereof combine toughness of the chromium nitride, the corrosion resistance of the chromium carbide and the conductivity of amorphous carbon film fully, and the chromium nitride, the chromium carbide and the amorphous carbon film are composited through a step transition method. The modified metal bipolar plate film base binding force is improved apparently, the corrosion resistance and the conductivity are enhanced apparently, and high-performance and long-time use requirements of the fuel cell metal bipolar plate can be met.

The invention discloses a proton exchange membrane fuel cell metal bipolar plate doped with a multilayer gradient membrane on the surface, and a preparation method of the proton exchange membrane fuel cell metal bipolar plate. The Ti, Al and / or Mo doped C / CrN multilayer gradient membrane is prepared on the surface of the metal bipolar plate by a closed-field unbalanced magnetron sputtering technology. The doped C / CrN multilayer gradient coating comprises a graphite-like carbon coating, a CrN coating and a Cr transition layer as well as Ti, Al, Mo, W, Nb, Ni, Zr, Fe, Si and other elements doped in the graphite-like membrane and / or the CrN coating for structure and component control. Compared with the prior art, the proton exchange membrane metal bipolar plate provided by the invention has the characteristics of excellent conductivity and corrosion resistance, low open porosity and cost and the like, the stacking performance of a fuel cell is greatly improved, and the service life of the fuel cell is greatly prolonged; and the metal bipolar plate can meet the use requirements of the fuel cell, and has broad application prospect.

The invention discloses a Ti / TiN / TiAlN composite coating on the surface of a cutting tool material and a preparation method of the Ti / TiN / TiAlN composite coating. The method comprises the following steps of: (1) cleaning the surface of the cutting tool material; (2) sequentially coating a Ti layer and a TiN layer through ion coating equipment; and (3) coating a TiAlN layer through magnetron sputtering equipment to obtain the Ti / TiN / TiAlN composite coating. The Ti / TiN / TiAlN composite coating has a relatively smooth surface, and is large in film base binding force and high in abrasion resistance; the service life of a tool can be prolonged; a coating film is high in processing quality; the Ti / TiN / TiAlN composite coating is simple in preparation process, easy to operate and suitable for batch production; automatic electric and mechanical control is adopted in a film coating process.

The invention discloses a preparation method for a super-hydrophobic metal surface. The method comprises the following steps: constructing a micrometer structure on the surface of a frequently used engineering material (such as copper, iron, stainless steel, nickel, aluminum, an aluminum alloy and a high-molecular section covering the above-mentioned metal through chemical plating) by using an electrocoppering process; then constructing a nanometer structure by using a chemical silvering process; and carrying out modification with low-surface energy substances like octadecanethiol so as to obtain excellent and stable super-hydrophobicity. The method has a wide application scope and can be used on pure metal, alloys and metalized high-molecular sections; an obtained surface has stable and reliable surface performance, strong film-substrate bonding force and good corrosion resistance, especially good acid resistance, can be extensively applied in fields like self-cleaning, water prevention and dehumidification, corrosion prevention, fluid drag reduction, frost prevention and condensation and heat exchange, and has an industrialization value.

The invention relates to metal surface treatment, in particular to surface treatment of low-temperature iron-base alloy molds of sliding components, bearings and the like and provides a diamond-like carbon film of a gradient structure and a preparation method of the diamond-like carbon film of the gradient structure. The diamond-like carbon film of the gradient structure is provided with a coating structure comprising a pure metal layer, a first gradient transition layer, a metal nitride layer, a second gradient transition layer, a tungsten carbide, a third gradient transition layer and a surface layer. The surface layer is a diamond-like layer or a silicon-containing type diamond layer. According to the diamond-like carbon film of the gradient structure, gradient control over elasticity modulus and hardness is achieved through ingredient gradient control between all the layers, and therefore the film-substrate cohesion force and the delaminating resistance of the coating are greatly improved.

The invention discloses a preparation technology of a multi-metal doping hydrogen-free diamond carbon film. The preparation technology is characterized in that by using an ion beam auxiliary deposition technology, a multi-metal mosaic target (formed by mosaicking a mosaic block 2 in a sputtering region 3 on a base target material 1) and a graphite target are used for double-target sputtering, and the multi-metal doping hydrogen-free diamond film is deposited and prepared on the surface of a workpiece. The preparation technology comprises the following specific steps: preparing the mosaic target, cleaning and activating ions on the surface of the workpiece, and depositing and preparing the multi-metal doping hydrogen-free diamond film. Compared with the prior art, the film prepared by the method has the advantages of higher hardness, film-based bonding force, elasticity modulus, abrasion resistance and hot stability property; and doping components can be adjusted so that the film can meet the requirement of transmission parts of precise instruments for accuracy and increases the reliability of the transmission parts. The film is suitable for surface treatment of silicon and various metal workpieces.

The invention relates to a wear-resistant hydrophobic nano composite film and a preparation method thereof, belonging to the technical field of metal surface treatment and modification. The composite film is based on high-speed steel, or titanium alloy, or hard alloy, or pure metal, and a pure metal film and a microstructure nano composite film are sequentially prepared on the base surface. The preparation method comprises the following steps: depositing a nano composite hard film with excellent mechanical properties on the base material surface by arc ion plating, and generating a micro / nano dual structure on the film surface by an ultra-fast laser processing technique to obtain the surface film with favorable mechanical properties and certain hydrophobicity. The film maintains excellent mechanical properties of the nano composite hard film: high surface hardness, high toughness, high wearability and high scratch resistance; and the microstructure on the film surface is constructed, so that the film has certain hydrophobicity. The preparation method has the advantages of simpler equipment, low cost, low energy consumption and no pollution, and can implement efficient green manufacturing.

The invention discloses a high-hardness and low-stress multi-element composite diamond-like coating. The coating is prepared from diamond-like carbon, a first doping element Al or Cu and a second doping element Cr or W, wherein the atomic percentage contents of the first doping element and the second doping element in the multi-element composite diamond-like coating are respectively 1.56%-4.69%. An experiment proves that the codoped diamond-like coating has high hardness and low stress, simultaneously also has low friction coefficient and attrition rate, good tenacity and corrosion resistance, and high film-based adhesion, therefore, the high-hardness and low-stress multi-element composite diamond-like coating is a multifunctional coating with good overall performance.

A surface modification technology of nanometer multi-layer hard membrane of Ti / titanium oxide by way of pulsed biasing. Apply to pulsed biasing to improve deposit quality of membrane in the arc process. Interchange Ar and N2 interchange and control the time interval. Then cover is fit on the preface of metal.

The invention discloses an accident fault tolerance nuclear fuel cladding coating for a zirconium alloy surface, and belongs to the technical field of accident fault tolerance nuclear fuel cladding coating. A first protection layer is mounted on the outer surface of zirconium alloy, a second protection layer is mounted on the outer surface of the first protection layer, and a third protection layer is mounted on the outer surface of the second protection layer. According to the accident fault tolerance nuclear fuel cladding coating for the zirconium alloy surface, through advantages of a laminated construction and compositing multiple coatings, a Cr coating can effectively improve the attaching force between the coating and a zirconium alloy substrate, meanwhile, the accident fault tolerance protection capacity is achieved, a CrTiAlN coating has the good high-temperature oxidation resistance property, and can be normally used in the normal state, and the high-temperature working condition, a CrN coating has the good corrosion resistance, and meets the long-term service under the hot water corrosion working condition, and the laminated composite protection coating can comprehensively improve the stability and the safety of accident fault tolerance nuclear fuel cladding.

The invention discloses a manufacturing method and equipment for a conductive layer in a novel electronic cigarette atomizer device based on the ion beam technology. The preparation method for preparing the conductive layer in the electronic cigarette atomizing device comprises the following steps of: taking porous aluminum nitride ceramic as a basal body, adopting a magnetic filter metal cathode vacuum arc (FCVA) technology, depositing a first metal nitride conductive layer on the surface of the basal body, and depositing on the first layer by adopting the FCVA process to obtain a second metal layer; and depositing on the second metal layer by adopting the FCVA depositing method to obtain a third conductive metal nitride layer, wherein the total thickness of the three layers of composite films is 1-10 microns, and the resistance is 1-10 ohms. According to the manufacturing method and the equipment, the novel electronic cigarette atomizer device with a long service life can be manufactured.

The invention discloses an apparatus for rapidly depositing a DLC film on the surface of a piston ring, and a method thereof. The apparatus comprises: an ion injection system used for vertically uniformly injecting ion flow; a vacuum chamber, wherein one end of the vacuum chamber is in sealing connection with the ion injection system, the other end of the vacuum chamber is in sealing connection with one end of a broad-beam magnetic filtering deposition system, and the other end of the broad-beam magnetic filtering deposition system is provided with an FCVA deposition cathode; a tool system used for realizing autorotation of a piston ring tool cylinder; and an intelligent control device used for controlling the ion injection and film deposition process, displaying a measurement result and preliminarily processing data. The apparatus and the method can realize large-batch uniform plating of the surface of the piston ring with the DLC film with high hardness and low friction coefficient.

The invention discloses a method for prolonging the service life of a diamond grinding wheel rod of polished optical glass based on the ion beam technology. According to the method, an ultra-thick and ultra-hard (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film which is high in friction coefficient and good in toughness is deposited on the surface of silicon carbide through an ion implantation technique and a magnetic filtration deposition technique. A method for preparing the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film comprises the steps that a metal cathode filtered cathodic vacuum arc (FCVA) system is adopted, and a workpiece is cleaned on the surface of the grinding wheel rod through high-energy large-beam metal ion beams; then a metal vacuum vapor ion source (MEVVA) method is adopted, and a metal "pinning layer" capable of improving the film-base combination force is injected into the surface of the workpiece; sine or cosine modulated deposition is conducted on the gas inlet amount on the metal"pinning layer" through a magnetic filtration filtered cathodic vacuum arc (FCVA) method, and the ultra-hard thick (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film which is good in toughness is obtained; and the modulation period is repeated till the total thickness of the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film reaches 10-30 microns. By the adoption of the method, the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film deposited on the workpiece is good in toughness and quite high in microhardness, and the service life of the grinding wheel rod can be prolonged by 2-5 times.

The invention provides a coating hard alloy matrix having high film-based binding force with metal nitride on the basis of design principles of an alloy material for phase lattice mismatch regulation at a film-based interface and regulation effectiveness guarantee and a preparation method of the alloy material. The hard alloy matrix is made of WC-Co-based alloy. WC-based hard phase and Co-based binding phase lattice constants are regulated respectively by adding Mo2C and Ru into the alloy at the same time to promote metal nitride film nucleation and stabilize interface phase crystal structure so as to realize effective regulation of phase lattice mismatch at the film-based interface; each of mass ratio of Mo2C and Co in the WC-Co-based alloy and mass ratio of Ru and Co is (10-15):100, grain size of the WC-based hard phase is smaller than 1.5um, and Co-based binding phase is of a close-packed hexagonal structure. The hard alloy matrix is prepared by adopting processes of wet milling, drying and granulating, pressing for forming and CO-containing pressurizing and sintering.

The invention discloses a preparation method and equipment of a patterned electrostatic chuck. The preparation method comprises the following steps that an ultra-large size (greater than 300 mm) ceramic sheet (AlN or Al2O3) is selected as a substrate, a patterned organic adhesive mask is printed on the substrate, and a high resistivity, high hardness, wear resistance and ion erosion resistance DLCfilm layer is deposited by utilizing an ion beam technology; a deposition method comprises the following steps that a high-energy metal vacuum vapor ion source (MEVVA ) is adopted, a metal element isinjected into the substrate to form a graded pseudo diffusion layer, and then a 90-degree ultra-wide magnetic filtration metal cathode vacuum arc (FCVA) technology is adopted, and a metal transitionlayer is deposited; a single T-shaped magnetic filtration cathode vacuum arc (FCVA) is adopted on the metal transition layer, and a DLC film layer with high sp2 content is obtained through the deposition; and a double-T-shaped magnetic filtration cathode vacuum arc (FCVA) is utilized on the DLC film layer with the high-sp2-content, and a super-hard DLC film layer is obtained through the deposition; and the resistance of the film layer can reach 10-50 megohm, and the hardness can reach 80 Gpa or above. According to the method and the equipment, the electrostatic chuck is enabled to have excellent wear resistance, and the service life is prolonged.

The invention discloses a TiC ceramic coating preparing method, which comprises the following steps: 1) placing block metal Ti electrode(1) and working electrode(4) in coal oil(2); 2) connecting anode of impulsing power source(3) to block metal Ti electrode(1); linking up with cathode of impulsing power source(3) and work electrode(4); 3) making connection with impulsing power source(3); carrying on electrochemical reaction with Ti metallic ion released form metal and C ion ionized from coal oil(2); compounding ceramic coating(5) of ceramic film TiC and depositing on the surface of work electrode. The invention improves the stability of craft and cementing property of basilemma.

A complex multi-mode plasma surface treatment installation relates to a plasma surface treatment installation which aims at the problem that when work pieces are processed via a complex surface treatment process, the work pieces need to be processed via different processes on two different devices, and the work pieces in the middle procedure are exposed to the air, forming disadvantageous foreign matters, which affects the property of final films. A magnetron sputtering target (4), vacuum cathodic arc source (14), metal ion implantation source (11), low-energy ion source (5) and a pump set (13) are fixedly installed on the outer wall of a vacuum chamber (1) inside which a radio frequency antenna (6) is fixedly installed, the upper end of a center electrode (9) passes through a sealed insulator (8) to be installed inside the vacuum chamber (1), the lower end of the center electrode is connected with a pulsed bias power supply (10), a high voltage target table (7) is fixed on the center electrode (9), and an upper cover (2) of the vacuum chamber is connected with a pneumatic device (12). The invention employs multiple generating means of particles, the work pieces can obtain thicker films as well as a variety of thicker films, thereby increasing the film-substrate cohesion and realizing the surface treatment of special shaped work pieces and the recombination of pluralities of processes.

The invention provides a boron-doped diamond / graphite composite electrode. The boron-doped diamond / graphite composite electrode comprises a graphite base body as well as a silicon-carbon compound layer and a boron-doped diamond layer which are sequentially stacked on the graphite base body. A thermal expansion coefficient of the silicon-carbon compound is within an intermediate value range of thethermal expansion coefficient of graphite and boron-doped diamond, and therefore, the silicon-carbon compound is taken as an intermediate transition layer, and difference of thermal expansion coefficients of layers of the boron-doped diamond / graphite composite electrode is reduced. Influences, on film-based binding force, of thermal residual stress are finally reduced, and film-based binding forceof the boron-doped diamond / graphite composite electrode is improved. The invention further provides a manufacturing method for the composite electrode, and the manufacturing method is simple in process, and is low in cost; and the silicon-carbon compound layer is deposited for avoiding pollution on a chamber, so that the industrial applicability is very great.

The invention discloses a preparation method of a photovoltaic glass surface antireflection film, which is characterized by comprising the following steps of firstly, preparing inorganic-organic hybrid silicasol; secondly, coating; thirdly, hydrophobic treatment; and fourthly, solidification treatment. Compared with the prior art, the invention has the advantages that the film-substrate cohesion between an antireflection film and substrate photovoltaic glass is stronger, and therefore, the wiping resistance of the coated photovoltaic glass surface antireflection film is enhanced; a layer of hydrophobic group with low surface energy is formed on the surface of the antireflection film, and therefore, the corrosion of moisture to a film microstructure is reduced, and the long service life ofthe coated photovoltaic glass is ensured; and the invention has low whole process cost and simple technical route and is suitable for industrial and large-scale application.

Bias regulation grid plasma immersion ion deposition DLC method. It involves plasma immersion ion deposition DLC method. The invention aims to solve the problems of poor binding force, difficult adjustment and control of film performance and non-uniformity of DLC film deposited on large or complex parts existing in the existing MPIID method for depositing DLC ​​films. Method: 1. Put the grid and the workpiece in the vacuum chamber, put the workpiece on the sample rack in the grid, insulate the grid from the workpiece, connect the grid to the high-voltage pulse power supply of the grid, and connect the workpiece to the high-voltage pulse power supply of the workpiece; 2. Splash the workpiece 3. Plasma nitriding treatment; 4. Sputtering etching treatment; 5. Preparation of SiC transition layer; 6. Preparation of bias control thin film. The invention is used for preparing DLC ​​film deposited by plasma immersion ion deposition of bias voltage control grid.

The invention relates to a method for preparing a diamond coating on the surface of cobalt-containing hard alloy and a tool and mold with a diamond coating. According to the invention, the surface ofa sample is subjected to sand blasting and cleaning treatment, an ideal basis is provided for high density and homogenization of diamond particles in an ultrasonic grinding and crystal planting stageand a mechanical riveting 'inlaying' effect of a grown diamond coating, the crystal planting uniformity and the 'inlaying' effect are improved, a ternary nitride coating with high aluminum content isselected as an insertion layer, the insertion layer is stable at high temperature, does not react with a surrounding medium, and has almost zero solid solubility to cobalt, the coefficient of thermalexpansion of the insertion layer is between the coefficient of thermal expansion of the diamond coating and the coefficient of thermal expansion of a hard alloy matrix, a cobalt element in the hard alloy matrix can be effectively prevented from diffusing outwards, the nucleation interface strength of the diamond coating and the quality of the diamond coating are improved, and therefore the film-substrate binding force of the diamond coating and the quality of the diamond coating are effectively improved.

The invention relates to a doped sulfide composite film, a preparing method of the doped sulfide composite film and a workpiece comprising the doped sulfide composite film. The doped sulfide compositefilm is composed of doped elements and sulfide, wherein the doped elements are Ce and Al, and the sulfide is WS2 or MoS2; and the doped sulfide composite film includes, by mass, 6.11%-14.27% of Ce, 1.13%-10.26% of Al and the balance sulfide. The mechanical performance of the doped sulfide composite film is improved, and therefore good wear-resisting performance can be shown; and the crystal strength of the Ce and Al co-doped sulfide base composite film is high, and the elasticity and elasticity modulus are improved by 300% or higher.

The invention belongs to the field of diamond-like coatings and particularly relates to an ion surface etching method for a diamond-like coating before preparing. The treatment method includes material polishing, vacuum pumping and heating, substrate cleaning and surface etching treatment, wherein two high-purity twin titanium targets are adopted as the target material, an intermediate-frequency magnetron sputtering method is adopted, cooperation of the pulse negative bias is adopted, high-energy titanium ions are adopted for conducting bombarding on the surface of a base body, an etching effect is generated, and the effect of modifying the surface of the base body is achieved. The diamond-like coating is prepared on the base body treated through the method so that good bonding strength and friction performance can be obtained, the coating and base body bonding force is 25.10 N, the friction coefficients of contact friction with silicon nitride and a titanium alloy are 0.14 and 0.12 respectively, and the wear rates are 8.32 E-12 mm<3> / Nm and 1.93 E-11 mm<3> / Nm respectively. The method is adopted as the pretreatment technology for preparing the diamond-like coating, the bonding strength of the coating can be improved, the technology is advanced, production is easy, and promotional value is achieved.

The invention discloses the magnetron sputtering-laser heating composite diffusion coating technology and the equipment, by utilizing the magnetron sputtering and a laser heating device, a single diffusion coating layer or a composite diffusion coating layer with a diffusion layer and a sedimentary layer or the diffusion layer plus the sedimentary layer which comprises metal element and nonmetal element is formed on the surface of a conducting workpiece. The invention has the advantages that by utility a magnetron sputtering target, sufficient pre-diffusing alloy element can be provided; by utilizing the laser heating, the diffused material can heated to high temperature in a short time and the diffusing speed is greatly increased; the DEG Cree of vacuum of the metal for diffusing is increased at least one order of magnitude compared with the common alloying method, and the surface quality of the diffused workpiece can be greatly improved; the diffusion coating can be performed continuously, and the production in large area and large scale can be realized.

The invention relates to a strength and toughness integrated fullerene-like carbon-nitrogen multilayer composite film and a preparation method thereof and belongs to the technical field of surface engineering. The film structure comprises a metal matrix, a soft-hard alternate transition layer and a fullerene-like carbon-nitrogen layer in sequence, wherein the soft-hard alternate transition layer repeatedly alternates by taking one layer of Ti film and one layer of TiN film as one cycle; one layer of Ti film is arranged on the metal matrix; one layer of TiN film is arranged below the fullerene-like carbon-nitrogen layer. The film has the advantages of high hardness, high toughness, high binding force, good deformation capability of the film and the matrix and excellent wear resistance, thereby improving the binding force of a film matrix and wear resistance of the matrix as well as prolonging the life of the matrix. According to the preparation method disclosed by the invention, the soft-hard alternate transition layer is prepared by a direct current pulse magnetron sputtering method; internal stress is reduced and crack propagation is stopped; the method is simple and easy to control.

The invention discloses a self-lubricating composite coating, a coating preparation method and a product with the coating. The self-lubricating composite coating comprises a plurality of AlSn20Cu layers and a plurality of MoS2 layers which are arranged alternately. According to the self-lubricating composite coating, the MoS2 lubricating layers are introduced into the original AlSn20Cu coatings, so that the coating is diversified in component and structure, the stress of the coating can be effectively reduced, and film-base binding force is increased; and additionally, through introduction of a MoS2 phase, the tribological performance of the coating in the oil-lack and dry-friction environments can be greatly improved while the original lubricating performance of the AlSn20Cu coatings is not changed.

The invention includes following structures and steps: using YSZ and RCO ceramics target as well as using monocrystalline silicon MgO and Ni-YSZ or Ni-RCO anode plate as substrate, distance between target and substrate as 30-80mm; vacuum degree 1X10-4-1X10-5 Pa, substrate temperature 300 deg.C-800 deg.C; ratio of gas pressure between oxygen and argon as 5%-40%; Thickness of each film is 10-200 nano, and number of layer is larger than or equal to three, the invention also contains other technical parameters. Multiple layers of nano film provides advantages of raising conductivity of oxyanion 10%-50%, optimizing fuel cell performance. The disclosed sputtering technique has features of fast, and high quality.

The invention relate to a coating method for preventing high-speed impact. The coating method comprise the following steps that preliminary ion cleaning is carried out on the surface of a substrate; the substrate after surface cleaning is subjected to laser subsurface microstructure; after deep cleaning on a structured surface, ion implantation is carried out and annealing is carried out to form apseudo diffusion layer; a polymer energy-absorbing film layer is deposited on the pseudo diffusion layer by an evaporation method; a polymer layer is metallized by polymer layer by high energy ion implantation; a superhard diamond coating is deposited on a metallized layer by using magnetic filtration deposition equipment; and the polymer layer, the metallized layer and a superhard diamond-like carbon layer are circularly prepared for 3-5 times. According to the coating method provided by the invention, the impact resistance of the matrix against high-speed moving objects is obviously improved by combining a matrix microstructure, ion implantation and deposition coating. The coating method is simple and easy to operate, low in cost and high in efficiency, and thus is very suitable for batch production.

The invention relates to a doped graphite-like composite film, a preparation method thereof and a component comprising the doped graphite-like composite film. The doped graphite-like composite film comprises doped elements and graphite-like, wherein the doped elements include, by mass, 6.47-13.49% of doped element cerium, 1.21-12.26% of doped element aluminum, and the balance the graphite-like. The mechanical performance of the doped graphite-like composite film is enhanced, and the doped graphite-like composite film shows the excellent wear-resisting performance. The crystallization strengthof the cerium and aluminum co-doped doped graphite-like composite film is high, and the hardness and elasticity modulus of the cerium and aluminum co-doped doped graphite-like composite film are bothimproved by 10% or more.