Composite multi-mode plasma surface processing device
A surface treatment device, plasma technology, applied in the direction of ion implantation plating, coating, metal material coating process, etc., can solve problems such as unfavorable workpieces and affect the performance of the film layer, so as to improve the bonding force of the film base and optimize the film. Layer structure and performance control, good effect of film layer performance
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0007] Specific implementation mode 1: This embodiment will be described with reference to Figs. 1 to 3. This embodiment consists of a vacuum chamber 1, an upper cover of the vacuum chamber 2, a magnetron sputtering target 4, a low-energy ion source 5, a radio frequency antenna 6, and a high-voltage target platform 7. , Sealing insulator 8, center electrode 9, pulse bias power supply 10, metal ion implantation source 11, chassis 26, pneumatic device 12, pump set 13, vacuum cathode arc source 14; the vacuum cathode arc source 14 consists of one A straight tube vacuum cathode arc source 15 and a 90° elbow tube vacuum cathode arc source 16, the two magnetron sputtering targets 4, a straight tube vacuum cathode arc source 15, and a 90° elbow tube vacuum cathode arc source 16 , A metal ion implantation source 11, a low-energy ion source 5 and a group of pumps 13 are fixedly installed in the through hole on the outer wall of the vacuum chamber 1. A radio frequency antenna 6 is fixed in ...
Example Embodiment
[0008] Specific embodiment 2: This embodiment will be described with reference to FIG. 1. The pneumatic device 12 of this embodiment is composed of a cylinder 17 and a cylinder piston 18; one end of the cylinder piston 18 is fixedly connected to the upper cover 2 of the vacuum chamber, and the other of the cylinder piston 18 One end is installed in the air cylinder 17, and the air cylinder 17 is fixedly installed on the bottom frame 26. With this arrangement, the structure is simple and easy to operate, and the upper cover of the vacuum chamber can be opened and closed at any time. Other composition and connection relationship and
[0009] The specific embodiment one is the same.
Example Embodiment
[0010] Specific embodiment 3: This embodiment is described with reference to FIG. 1. The sealing insulator 8 of this embodiment is made of polytetrafluoroethylene insulating material or ceramic (glazed 95 porcelain) insulating material, and has good sealing performance. Other components and connection relationships are the same as those in the first or second embodiment.
[0011] Specific embodiment 4: This embodiment will be described with reference to Figures 1 and 2. The pump set 13 of this embodiment consists of a mechanical pump 19, a molecular pump 20, a first valve 21, a second valve 22, a flapper valve 23, and a grating valve 24. Composition; the output end of the mechanical pump 19 is connected to the grating valve 24 and the input end of the molecular pump 20 through the first valve 21 and the second valve 22, respectively, and the output end of the molecular pump 20 is connected to the input end of the flapper valve 23, The output end of the plug-in valve 23 is connecte...
PUM
Property | Measurement | Unit |
---|---|---|
Diameter | aaaaa | aaaaa |
Thickness | aaaaa | aaaaa |
Diameter | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap