Doped graphite-like composite film, preparation method thereof and component comprising doped graphite-like composite film

A composite film and graphite technology, applied in the field of surface engineering, can solve the problems of complex preparation methods, high friction coefficient, high wear rate, etc., and achieve the effects of enhanced mechanical properties, high crystallization strength, hardness and elastic modulus

Inactive Publication Date: 2019-12-17
HENAN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The first object of the present invention is to provide a doped graphite-like composite film to solve the problems of low hardness, high friction coefficient and high wear rate of the graphite-like film in the prior art
[0006] The second object of the present invention is to provide a method for preparing a doped graphite-like composite film, so as to solve the problems of complicated and high-cost preparation methods in the prior art

Method used

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  • Doped graphite-like composite film, preparation method thereof and component comprising doped graphite-like composite film

Examples

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Embodiment 1

[0029] The doped graphite-like composite film of this embodiment is composed of doping elements and graphite-like, the doping elements are cerium and aluminum, the mass percentage of the doping element cerium is 12.98%, and the mass percentage of the doping element aluminum is 2.12% , and the balance is graphite-like.

Embodiment 2-14

[0031] The doped graphite-like composite films of Examples 2-14 are composed of doping elements and graphite-like composite films, and the doping elements are cerium and aluminum; the content of each component is listed in Table 1.

[0032] The doped sulfide (WS) of table 1 embodiment 2-13 2 ) composition of the composite film

[0033]

[0034] 2. The following specific examples of the preparation method of the doped graphite-like composite film will describe the preparation of the doped graphite-like composite film in Examples 1-14 respectively.

Embodiment 15

[0036] The preparation method of the doped graphite-like composite film of the present embodiment describes the preparation of the doped graphite-like composite film of Example 1, specifically comprising the following steps:

[0037] 1) Use absolute ethanol to clean the surface of the substrate silicon wafer in an ultrasonic cleaner for 15 minutes, then use acetone to clean the surface of the substrate silicon wafer in an ultrasonic cleaner for 10 minutes; put the substrate silicon wafer into a vacuum chamber for vacuum treatment, and the vacuum degree is 5e-4Pa; Introduce argon gas, the flow rate of argon gas is 40sccm, control the pressure of argon gas in the vacuum chamber to 1.2Pa, preheat the substrate for 60 minutes, and the temperature of the preheat treatment is 300°C;

[0038] 2) Maintain the argon gas flow rate in the vacuum chamber at 40 sccm, and the argon gas pressure at 1.2 Pa; use the magnetron sputtering method to deposit a doped graphite-like composite film on ...

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Abstract

The invention relates to a doped graphite-like composite film, a preparation method thereof and a component comprising the doped graphite-like composite film. The doped graphite-like composite film comprises doped elements and graphite-like, wherein the doped elements include, by mass, 6.47-13.49% of doped element cerium, 1.21-12.26% of doped element aluminum, and the balance the graphite-like. The mechanical performance of the doped graphite-like composite film is enhanced, and the doped graphite-like composite film shows the excellent wear-resisting performance. The crystallization strengthof the cerium and aluminum co-doped doped graphite-like composite film is high, and the hardness and elasticity modulus of the cerium and aluminum co-doped doped graphite-like composite film are bothimproved by 10% or more.

Description

technical field [0001] The application relates to the technical field of surface engineering, in particular to a doped graphite-like composite film, a preparation method thereof, and a component containing a doped graphite-like composite film. Background technique [0002] Graphite-like carbon-based films are based on SP 2 An amorphous carbon film with hybrid carbon bonds as the main part and a hydrogen content of less than 20%, also known as GLC, graphite-like film material has received extensive research attention because of its excellent lubricating properties. The oxidation resistance temperature of this film material Higher, excellent anti-friction and anti-radiation properties, it has the integrated characteristics of wear resistance and self-lubrication, and has been widely used in aerospace, high-end equipment oil-free lubrication systems and other fields. However, graphite-like films have problems such as high internal stress, poor plasticity and toughness, and poo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35C23C14/02
CPCC23C14/02C23C14/021C23C14/0605C23C14/352
Inventor 蔡海潮薛玉君叶军司东宏李航贺江涛杨芳刘春阳马喜强
Owner HENAN UNIV OF SCI & TECH
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