42results about How to "High atomic ionization rate" patented technology

The invention discloses method and equipment for prolonging the life of a push rod component in a sealed relay. In the method, a superhard wear-resistant film layer with good insulating property is deposited on the surface of a push ball in the push rod component by a low-energy ion beam technology; and the film is prepared by the following steps: injecting a layer of metal 'pinning layer' capable of improving binding force of the film into glass surface by a metal vapor vacuum arc (MEVVA) ion source method; depositing a first metal film transition layer for releasing internal stress on the metal 'pinning layer' by a magnetic filtered cathodic vacuum arc (FVCA) deposition method; and depositing a superhard wear-resistant DLC layer on the first transition layer by the magnetic FVCA deposition method, wherein the total thickness of the film is 0.1-5 microns. Through the invention, the life of the push ball in the push rod component of the sealed relay can be obviously prolonged by depositing the superhard DLC film on the push rod component of the sealed relay.

The invention discloses a method and equipment for depositing ultrahard and ultrathick diamond-like carbon (DLC) film layers with excellent bonding force and high sand dust erosion resistance on the surface of an engine blade based on an ion beam technology, and the method for preparing DLC films comprises the following steps: a metal vapor vacuum arc ion source method (MEVVA) is adopted to inject a metal binding layer capable of improving the film base bonding force on the surface of the blade; a 90-degree magnetic filtered cathodic vacuum arc deposition method (FCVA) is adopted to deposit on the metal binding layer to obtain a first metal film transition layer for releasing internal stress; a 180-degree magnetic filtered cathodic vacuum arc (FCVA) deposition method is adopted to deposit on the first transition layer to obtain a second soft DLC layer; and negative-pressure 180-degree magnetic filtered deposition is changed on the second soft layer to obtain an ultrahard DLC film layer until the total film thickness is 10-25 microns. The engine blade can be preferably protected through depositing the DLC films on the engine blade, and is prevented from being damaged by erosion of sand dust.

The invention discloses a method and device for repairing a TiN / DLC / TiN nano composite film which is excellent in bonding force and high in sand erosion resistance on the surface of a blade of an engine. The method for preparing the TiN / DLC / TiN nano composite film comprises the steps that a metal 'pinning layer' which can improve the bonding force of a film base is injected into the surface of the blade through a metal vapor vacuum arc (MEVVA) ion source method; deposition is conducted on the metal 'pinning layer' through a magnetic filtered cathodic vacuum arc (FCVA) deposition method, so that a first metal / metal oxide film transition layer used for releasing the internal stress is obtained; deposition is conducted on the first transition layer through the magnetic FCVA deposition method, so that a second soft DLC layer is obtained; deposition is conducted on the second soft layer, so that a third superhard TiN film is obtained; and the second layer and the third layer are prepared by repeatedly conducting the process till the overall thickness of the TiN / DLC / TiN nano composite film is 10-30 micrometers. By the adoption of the method and device, the TiN / DLC / TiN nano composite film is deposited on the blade of the engine, so that the blade of the engine is well protected, and the situation that the blade of the engine is damaged due to sand erosion is prevented.

The invention discloses a manufacturing method and equipment for a conductive layer in a novel electronic cigarette atomizer device based on the ion beam technology. The preparation method for preparing the conductive layer in the electronic cigarette atomizing device comprises the following steps of: taking porous aluminum nitride ceramic as a basal body, adopting a magnetic filter metal cathode vacuum arc (FCVA) technology, depositing a first metal nitride conductive layer on the surface of the basal body, and depositing on the first layer by adopting the FCVA process to obtain a second metal layer; and depositing on the second metal layer by adopting the FCVA depositing method to obtain a third conductive metal nitride layer, wherein the total thickness of the three layers of composite films is 1-10 microns, and the resistance is 1-10 ohms. According to the manufacturing method and the equipment, the novel electronic cigarette atomizer device with a long service life can be manufactured.

The invention discloses an apparatus for rapidly depositing a DLC film on the surface of a piston ring, and a method thereof. The apparatus comprises: an ion injection system used for vertically uniformly injecting ion flow; a vacuum chamber, wherein one end of the vacuum chamber is in sealing connection with the ion injection system, the other end of the vacuum chamber is in sealing connection with one end of a broad-beam magnetic filtering deposition system, and the other end of the broad-beam magnetic filtering deposition system is provided with an FCVA deposition cathode; a tool system used for realizing autorotation of a piston ring tool cylinder; and an intelligent control device used for controlling the ion injection and film deposition process, displaying a measurement result and preliminarily processing data. The apparatus and the method can realize large-batch uniform plating of the surface of the piston ring with the DLC film with high hardness and low friction coefficient.

The invention discloses a method for prolonging the service life of a diamond grinding wheel rod of polished optical glass based on the ion beam technology. According to the method, an ultra-thick and ultra-hard (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film which is high in friction coefficient and good in toughness is deposited on the surface of silicon carbide through an ion implantation technique and a magnetic filtration deposition technique. A method for preparing the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film comprises the steps that a metal cathode filtered cathodic vacuum arc (FCVA) system is adopted, and a workpiece is cleaned on the surface of the grinding wheel rod through high-energy large-beam metal ion beams; then a metal vacuum vapor ion source (MEVVA) method is adopted, and a metal "pinning layer" capable of improving the film-base combination force is injected into the surface of the workpiece; sine or cosine modulated deposition is conducted on the gas inlet amount on the metal"pinning layer" through a magnetic filtration filtered cathodic vacuum arc (FCVA) method, and the ultra-hard thick (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film which is good in toughness is obtained; and the modulation period is repeated till the total thickness of the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film reaches 10-30 microns. By the adoption of the method, the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film deposited on the workpiece is good in toughness and quite high in microhardness, and the service life of the grinding wheel rod can be prolonged by 2-5 times.

The invention discloses a preparation method and equipment of a patterned electrostatic chuck. The preparation method comprises the following steps that an ultra-large size (greater than 300 mm) ceramic sheet (AlN or Al2O3) is selected as a substrate, a patterned organic adhesive mask is printed on the substrate, and a high resistivity, high hardness, wear resistance and ion erosion resistance DLCfilm layer is deposited by utilizing an ion beam technology; a deposition method comprises the following steps that a high-energy metal vacuum vapor ion source (MEVVA ) is adopted, a metal element isinjected into the substrate to form a graded pseudo diffusion layer, and then a 90-degree ultra-wide magnetic filtration metal cathode vacuum arc (FCVA) technology is adopted, and a metal transitionlayer is deposited; a single T-shaped magnetic filtration cathode vacuum arc (FCVA) is adopted on the metal transition layer, and a DLC film layer with high sp2 content is obtained through the deposition; and a double-T-shaped magnetic filtration cathode vacuum arc (FCVA) is utilized on the DLC film layer with the high-sp2-content, and a super-hard DLC film layer is obtained through the deposition; and the resistance of the film layer can reach 10-50 megohm, and the hardness can reach 80 Gpa or above. According to the method and the equipment, the electrostatic chuck is enabled to have excellent wear resistance, and the service life is prolonged.

The invention discloses a method for preparing a super-thick and high-toughness TiN film. The method for preparing the TiN film comprises the steps that 1, a metal filtered cathodic vacuum arc (FCVA) deposition system is adopted, and the surface of a workpiece is cleaned through high-energy large-beam metal ion beams; 2, a layer of metal 'pinning layer' capable of improving the film base binding force is injected into the surface of the workpiece through a metal vapor vacuum arc (MEVVA) ion source method; 3, on the metal 'pinning layer', the gas inlet quantity is subjected to sine or cosine modulation and deposition through a filtered cathodic vacuum arc (FCVA) deposition method, and thus the super-hard good-toughness thick TiN film layer is obtained; and 4, the modulation period is repeated till the total thickness of the TiN film is 10-30 microns. By means of the method for preparing the super-thick and high-toughness TiN film, the TiN film deposited on the workpiece has very good toughness and very high microhardness.

The invention relates to a piston with a Ti-doping diamond multi-layer thick heat-insulating film on the top face and a preparation method and application of the piston. The piston comprises a piston substrate, a transitional layer, n layers of TiC / DLC film layers and m buffer layers, wherein the outermost layer of the top face of the piston is the last TiC / DLC film layer. According to the preparation method of the piston, the transitional layer is prepared on the top face of the piston substrate; then the first TiC / DLC film layer is prepared; one buffer layer is formed on the first TiC / DLC film layer; the TiC / DLC film layers and the buffer layers are formed alternately, so that a middle layer is obtained, and then the last TiC / DLC film layer is prepared. According to the piston with the Ti-doping diamond multi-layer thick heat-insulating film on the top face has excellent abrasion resistance and thermal impact resistance and can meet the requirement of modern engines for high efficiency and low emission.

The invention discloses a self-supporting germanium film with mass thickness ranging from 600 to 1200 mu g / cm<2> and its preparation method thereof. The preparation method includes the steps of (1), depositing a sodium chloride release agent on the surface of a substrate; (2), depositing a zinc oxide buffer film on the surface of the substrate through a 90-degree magnetron filtered cathode vacuumarc (FCVA) system; (3), turning a sample 180 DEG, depositing the indium film again through a straight magnetron FCVA system; (4), subjecting the treated substrate to stripping in a container containing ethanol solution; (5), picking the germanium film through a fishing plate to obtain the self-supporting germanium film with mass thickness ranging from 700 to 1400 mu g / cm<2>. The self-supporting germanium film with mass thickness ranging from 700 to 1400 mu g / cm<2> has low stress, is uniform and compact, and the preparation method is simple.

The invention relate to a coating method for preventing high-speed impact. The coating method comprise the following steps that preliminary ion cleaning is carried out on the surface of a substrate; the substrate after surface cleaning is subjected to laser subsurface microstructure; after deep cleaning on a structured surface, ion implantation is carried out and annealing is carried out to form apseudo diffusion layer; a polymer energy-absorbing film layer is deposited on the pseudo diffusion layer by an evaporation method; a polymer layer is metallized by polymer layer by high energy ion implantation; a superhard diamond coating is deposited on a metallized layer by using magnetic filtration deposition equipment; and the polymer layer, the metallized layer and a superhard diamond-like carbon layer are circularly prepared for 3-5 times. According to the coating method provided by the invention, the impact resistance of the matrix against high-speed moving objects is obviously improved by combining a matrix microstructure, ion implantation and deposition coating. The coating method is simple and easy to operate, low in cost and high in efficiency, and thus is very suitable for batch production.

The invention discloses a device for preparing a high-shielding substrate coating, and relates to the technical field of coating devices. The device for preparing the high-shielding substrate coatingmainly comprises a vacuum chamber, a first flange hole is formed in the rear side of the middle of the vacuum chamber in the horizontal direction, and a to-be-machined workpiece enters the vacuum chamber through the first flange hole; the vacuum chamber also communicates with a gas ion source system, a deposition system and a molecular pump; the vacuum chamber is provided with an air inlet; surface gas ion source cleaning is performed on the to-be-machined workpiece through the gas ion source system; nitrogen is introduced to carry out surface nitridation, the fatigue resistance of a substrateis improved, and preparation of a circulating multilayer coating is performed; and the workpiece is rotated in the vacuum chamber. Each layer in the unit coating is a mixture of nitride and oxide nanocrystals, so that the internal stress generated during deposition can be released, and oxides of Al and Cr in the coating have good high-temperature resistance at the same time.

The invention relates to a Cr / CrNx heat insulating film for the top surface of an aluminium alloy piston and a preparation method of the Cr / CrNx heat insulating film. The Cr / CrNx heat insulating filmis formed by a pure metal Cr layer attached to the top surface of the aluminium alloy piston and a CrNx layer coating the pure metal Cr layer uniformly. The preparation method of the Cr / CrNx heat insulating film comprises the following steps: firstly, the cleaned and dried aluminium alloy piston is placed in an FCVA (filtered cathodic vacuum arc) deposition system, a magnetic filtered Ti power arcis switched on, and the pure metal Cr layer is deposited with a pure metal Cr target as a cathode; the aluminium alloy piston with the pure metal Cr layer on the top surface is obtained; then the pure metal Cr target is taken as the cathode, nitrogen is taken as working gas, the nitrogen introducing amount is regulated, and the CrNx layer is generated on the pure metal Cr layer of the aluminium alloy piston with the pure metal Cr layer on the top surface. The strength, the wear resistance and the heat insulation performance of the obtained product are all better than those of the existing products, requirements of modern engines for high power and low emission can be met, and large-scale industrial application is facilitated.

The invention provides a method for preparing zirconium pipe coating of a light-water reactor. The method mainly comprises the following steps that a CrAbSi circulating nano coating and a MoNbZr circulating nano coating are alternately deposited by utilizing a high-power pulse technology and a magnetic filtration deposition technology, the thickness of the CrAbSi circulating nano coating and the MoNbZr circulating nano coating in a unit period is 0-15 nanometers, and the total thickness of the coating is 0-15 micrometres. After the nano coatings are deposited alternately, the oxidation resistance of the zirconium pipe at high temperature and high pressure in a high-pressure kettle is obviously enhanced, by implementing the method, a nano-circulation composite structure (especially the elements of Al, Cr and Si are added) is deposited alternately on the zirconium pipe, so that the inward diffusion of an oxygen element at the high temperature can be very well prevented, due to the mutualsynergistic effect of various elements, falling off, cracking and diffusion behaviors of oxygen atoms of a film layer can be effectively prevented in the high temperature and high pressure, and the safety and reliability of a fault-tolerant fuel are improved.

The invention relates to a preparation method for a super-thick energy absorption coating layer. The preparation method comprises the steps that S01, a substrate is subjected to gas ion source cleaning; S02, the substrate is subjected to high-power pulse metal ion cleaning; S03, acetylene and nitrogen are injected for CrAlNC deposition; S04, an acetylene valve is closed, and ZrN is deposited through high-power pulse magnetic control; S05, the nitrogen is stopped, and the acetylene is injected for CrAlC deposition; and S06, a film layer is circularly deposited till the thickness of the film layer is larger than 20 [mu]m. According to the preparation method provided by the embodiment of the invention, through the mode of combining a gas ion source technology and a high-power pulse magnetic control technology with a multi-arc ion plating technology, the deposited super-thick coating layer is small in internal stress and good in toughness, impact resistance and energy absorption performance. The preparation method is simple, easy to implement, low in cost and high in efficiency, and then is quite suitable for batch production.

The invention discloses a method for preparing a super-thick and high-toughness TiN film. The method for preparing the TiN film comprises the steps that 1, a metal filtered cathodic vacuum arc (FCVA) deposition system is adopted, and the surface of a workpiece is cleaned through high-energy large-beam metal ion beams; 2, a layer of metal 'pinning layer' capable of improving the film base binding force is injected into the surface of the workpiece through a metal vapor vacuum arc (MEVVA) ion source method; 3, on the metal 'pinning layer', the gas inlet quantity is subjected to sine or cosine modulation and deposition through a filtered cathodic vacuum arc (FCVA) deposition method, and thus the super-hard good-toughness thick TiN film layer is obtained; and 4, the modulation period is repeated till the total thickness of the TiN film is 10-30 microns. By means of the method for preparing the super-thick and high-toughness TiN film, the TiN film deposited on the workpiece has very good toughness and very high microhardness.

The invention discloses a method for prolonging the service life of a diamond grinding wheel rod of polished optical glass based on the ion beam technology. According to the method, an ultra-thick and ultra-hard (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film which is high in friction coefficient and good in toughness is deposited on the surface of silicon carbide through an ion implantation technique and a magnetic filtration deposition technique. A method for preparing the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film comprises the steps that a metal cathode filtered cathodic vacuum arc (FCVA) system is adopted, and a workpiece is cleaned on the surface of the grinding wheel rod through high-energy large-beam metal ion beams; then a metal vacuum vapor ion source (MEVVA) method is adopted, and a metal "pinning layer" capable of improving the film-base combination force is injected into the surface of the workpiece; sine or cosine modulated deposition is conducted on the gas inlet amount on the metal"pinning layer" through a magnetic filtration filtered cathodic vacuum arc (FCVA) method, and the ultra-hard thick (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film which is good in toughness is obtained; and the modulation period is repeated till the total thickness of the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film reaches 10-30 microns. By the adoption of the method, the (AlTi)1-xNx / AlTiCN / TiAl / (ZrAl)1-xNx composite film deposited on the workpiece is good in toughness and quite high in microhardness, and the service life of the grinding wheel rod can be prolonged by 2-5 times.

The invention discloses a self-supporting indium film with mass thickness ranging from 600 to 1200 mu g / cm<2> and its preparation method thereof. The preparation method includes the steps of (1), depositing a sodium chloride release agent on the surface of a substrate; (2), depositing a zinc oxide buffer film on the surface of the substrate through a 90-degree magnetron filtered cathode vacuum arc(FCVA) system; (3), turning a sample 180 DEG, depositing the indium film again through a straight magnetron FCVA system; (4), subjecting the treated substrate to stripping in a container containing ethanol solution; (5), picking the indium film through a fishing plate to obtain the self-supporting indium film with mass thickness ranging from 600 to 1200 mu g / cm<2>. The self-supporting indium filmwith mass thickness ranging from 600 to 1200 mu g / cm<2> has low stress, is uniform and compact, and the preparation method is simple.

The invention discloses a large-scale self-supporting gallium thin-film and a preparation method thereof. The preparation method comprises the following steps that (1) a potassium chloride release agent is deposited on the surface of a substrate; (2) a magnesium oxide buffer thin-film is deposited on the surface of a substrate by adopting a 90-degree magnetic filtration cathode vacuum arc (FCVA) system; (3) a sample is rotated by 180 degrees, and a gallium thin-film is deposited again by adopting a straight tube magnetic filtration cathode vacuum arc (FCVA) system; (4) the obtained substrate is put into a container filled with ethanol solutions for demoulding treatment; and (5) the gallium thin-film is fished with a fishing plate to obtain a self-supporting gallium thin-film with mass thickness of 500-1000[mu]g / cm<2>. According to the large-scale self-supporting gallium thin-film and the preparation method thereof, the self-supporting gallium thin-film with the mass thickness of 500-1000[mu]g / cm<2>, low stress, uniformity and density is prepared, and process is simple.

The invention relates to a Cr / CrNx heat insulating film for the top surface of an aluminium alloy piston and a preparation method of the Cr / CrNx heat insulating film. The Cr / CrNx heat insulating filmis formed by a pure metal Cr layer attached to the top surface of the aluminium alloy piston and a CrNx layer coating the pure metal Cr layer uniformly. The preparation method of the Cr / CrNx heat insulating film comprises the following steps: firstly, the cleaned and dried aluminium alloy piston is placed in an FCVA (filtered cathodic vacuum arc) deposition system, a magnetic filtered Ti power arcis switched on, and the pure metal Cr layer is deposited with a pure metal Cr target as a cathode; the aluminium alloy piston with the pure metal Cr layer on the top surface is obtained; then the pure metal Cr target is taken as the cathode, nitrogen is taken as working gas, the nitrogen introducing amount is regulated, and the CrNx layer is generated on the pure metal Cr layer of the aluminium alloy piston with the pure metal Cr layer on the top surface. The strength, the wear resistance and the heat insulation performance of the obtained product are all better than those of the existing products, requirements of modern engines for high power and low emission can be met, and large-scale industrial application is facilitated.

The invention discloses a low-abrasion guide rod applied to pneumatic actuators and a surface process thereof. The surface process comprises the following steps that (1) a carbon steel base material of the guide rod is provided, the surface of the carbon steel base material is polished, and the carbon steel base material of the guide rod placed in an acidic solution, after the carbon steel base material is washed, and then washing and drying are carried out; step (2), a Hall gas ion source is used to perform gas bombardment on the pretreated base material to strengthen the surface of the basematerial; step (3), an Nd: YAG pulse laser puncher is used for punching a circular hole on the surface of the base material; and (4) ZrB2 target and MoS2 target are separately deposited on the surfaceof the base material by magnetic filtration deposition technology to form a solid coating, the surface of the base material is coated with solid coating, and the guide rod is obtained after surface process treatment. The guide rod applied to the pneumatic actuators application has excellent abrasion resistance, excellent corrosion resistance, self-lubricating property and good hardness.

The invention relates to a method for solving engine piston scuffing. Heat insulation film layers are deposited on a pit and a throat in the top of a piston, and are used for preventing conducting of heat of a combustion chamber to key components below the piston, and the piston scuffing problem is solved; according to one embodiment, the heat insulation film layers are deposited on the pit and the throat in the top of the piston, wherein the pit and the throat of the top of the piston are subject to surface cleaning; metal elements are injected into the pit and the throat of the top of the piston subject to surface cleaning, and a metal pinning layer is formed; the heat insulation film layers are deposited on the metal pinning layer. According to the heat insulation film layers prepared through the method, the obvious heat isolation effect is achieved, heat conduction of the relative high temperature of the combustion chamber to the key components below the top of the piston is obstructed, the heat expansion amount is obviously reduced, and meanwhile various problems caused by inconsistency of expansion coefficients can be directly solved.

The invention discloses a manufacturing method and equipment for a conductive layer in a novel electronic cigarette atomizer device based on the ion beam technology. The preparation method for preparing the conductive layer in the electronic cigarette atomizing device comprises the following steps of: taking porous aluminum nitride ceramic as a basal body, adopting a magnetic filter metal cathode vacuum arc (FCVA) technology, depositing a first metal nitride conductive layer on the surface of the basal body, and depositing on the first layer by adopting the FCVA process to obtain a second metal layer; and depositing on the second metal layer by adopting the FCVA depositing method to obtain a third conductive metal nitride layer, wherein the total thickness of the three layers of composite films is 1-10 microns, and the resistance is 1-10 ohms. According to the manufacturing method and the equipment, the novel electronic cigarette atomizer device with a long service life can be manufactured.

The invention discloses a self-supporting indium film with mass thickness ranging from 600 to 1200 mu g / cm<2> and its preparation method thereof. The preparation method includes the steps of (1), depositing a sodium chloride release agent on the surface of a substrate; (2), depositing a zinc oxide buffer film on the surface of the substrate through a 90-degree magnetron filtered cathode vacuum arc(FCVA) system; (3), turning a sample 180 DEG, depositing the indium film again through a straight magnetron FCVA system; (4), subjecting the treated substrate to stripping in a container containing ethanol solution; (5), picking the indium film through a fishing plate to obtain the self-supporting indium film with mass thickness ranging from 600 to 1200 mu g / cm<2>. The self-supporting indium filmwith mass thickness ranging from 600 to 1200 mu g / cm<2> has low stress, is uniform and compact, and the preparation method is simple.

The invention discloses a self-supporting tin thin film with a mass thickness of 700-1000 microgram / cm<2> and a preparation method thereof. The method comprises the following steps that a potassium chloride release agent is deposited on the surface of a substrate; (2) a copper oxide buffer thin film is deposited on the surface of the substrate by adopting a 90-degree magnetic filtration cathode vacuum arc (FCVA) system; (3) a sample is rotated by 180 degrees, and a straight-pipe magnetic filtration cathode vacuum arc (FCVA) system is adopted for depositing the tin thin film again; (4) the obtained substrate is put into a container filled with an ethanol solution for a de-molding treatment; and (5) the tin thin film is fished up by using a fishing plate to obtain the self-supporting tin thin film with the mass thickness of 700-1000 microgram / cm<2>. By adopting the preparation method, the self-supporting tin thin film which has the mass thickness with 700-1000 microgram / cm<2>, stress islow, uniform and compact can be prepared; and the process is simple.