The invention discloses a preparation method and equipment of a patterned electrostatic chuck. The preparation method comprises the following steps that an ultra-
large size (greater than 300 mm)
ceramic sheet (AlN or Al2O3) is selected as a substrate, a patterned organic
adhesive mask is printed on the substrate, and a
high resistivity, high
hardness,
wear resistance and
ion erosion resistance DLCfilm layer is deposited by utilizing an
ion beam technology; a deposition method comprises the following steps that a high-energy
metal vacuum vapor
ion source (MEVVA ) is adopted, a
metal element isinjected into the substrate to form a graded pseudo
diffusion layer, and then a 90-degree ultra-wide
magnetic filtration metal cathode vacuum arc (FCVA) technology is adopted, and a metal transitionlayer is deposited; a single T-shaped
magnetic filtration cathode vacuum arc (FCVA) is adopted on the metal
transition layer, and a DLC film layer with high sp2 content is obtained through the deposition; and a double-T-shaped
magnetic filtration cathode vacuum arc (FCVA) is utilized on the DLC film layer with the high-sp2-content, and a super-hard DLC film layer is obtained through the deposition; and the resistance of the film layer can reach 10-50 megohm, and the
hardness can reach 80 Gpa or above. According to the method and the equipment, the electrostatic chuck is enabled to have excellent
wear resistance, and the service life is prolonged.