Method and device for prolonging service life of diamond grinding wheel rod of polished optical glass based on ion beam technology

Abstract

The invention discloses a method for prolonging the service life of a diamond grinding wheel rod of polished optical glass based on the ion beam technology. According to the method, an ultra-thick and ultra-hard (AlTi)1-xNx/AlTiCN/TiAl/(ZrAl)1-xNx composite film which is high in friction coefficient and good in toughness is deposited on the surface of silicon carbide through an ion implantation technique and a magnetic filtration deposition technique. A method for preparing the (AlTi)1-xNx/AlTiCN/TiAl/(ZrAl)1-xNx composite film comprises the steps that a metal cathode filtered cathodic vacuum arc (FCVA) system is adopted, and a workpiece is cleaned on the surface of the grinding wheel rod through high-energy large-beam metal ion beams; then a metal vacuum vapor ion source (MEVVA) method is adopted, and a metal "pinning layer" capable of improving the film-base combination force is injected into the surface of the workpiece; sine or cosine modulated deposition is conducted on the gas inlet amount on the metal"pinning layer" through a magnetic filtration filtered cathodic vacuum arc (FCVA) method, and the ultra-hard thick (AlTi)1-xNx/AlTiCN/TiAl/(ZrAl)1-xNx composite film which is good in toughness is obtained; and the modulation period is repeated till the total thickness of the (AlTi)1-xNx/AlTiCN/TiAl/(ZrAl)1-xNx composite film reaches 10-30 microns. By the adoption of the method, the (AlTi)1-xNx/AlTiCN/TiAl/(ZrAl)1-xNx composite film deposited on the workpiece is good in toughness and quite high in microhardness, and the service life of the grinding wheel rod can be prolonged by 2-5 times.

Description

technical field [0001] The invention relates to the technical field of surface modification of ray beam materials, in particular to a super-thick and super-hard surface deposition of a grinding wheel rod for improving the service life of a grinding wheel rod for polishing a screen of a mobile phone (AlTi) with a high coefficient of friction and good toughness 1-x N x / AlTiCN / TiAl / (ZrAl) 1-x N x Composite membrane method. Background technique [0002] Optical glass is a hard and brittle material with low fracture toughness. It is easy to produce defects such as surface microcracks and subsurface damage during processing. Therefore, it is difficult to process, especially under the premise of meeting the precision. It is difficult to ensure high efficiency. For a large number of large-diameter optical components, meeting the processing requirements of the large-scale components' full-surface surface accuracy within a specified time poses a great challenge to the national opt...

AI Technical Summary

Problems solved by technology

[0003] However, the resin bond and its abrasive tools also have the following disadvantages: the abrasive tool has poor heat resistance and is not suitable for ultra-high-speed grinding; the bond and abrasive grains are physically bonded, the bonding strength is poor, and the resistance to external impact is easily damaged. ; The service life is not long, and the processing cost is slightly higher

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