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Diamond-like carbon film of gradient structure and preparation method thereof

A technology of diamond film and gradient structure, which is applied in metal material coating process, superimposed layer plating, coating, etc. Destruction and other problems, to achieve the effect of improving the ability to resist delamination and spalling, improving deformation coordination, and good mechanical compatibility

Active Publication Date: 2017-03-22
广州今泰科技股份有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the use or marking process is likely to produce large deformation differences between the interface layers, resulting in interface damage, thereby affecting the film-base bonding force of the coating and the impact toughness of the coating.

Method used

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  • Diamond-like carbon film of gradient structure and preparation method thereof

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Comparison scheme
Effect test

Embodiment 1

[0056] Embodiment 1, a kind of gradient structure diamond-like carbon film

[0057] The diamond-like film described in Example 1 of the present invention includes a workpiece 1, a pure metal layer 2, a first gradient transition layer 3, a metal nitride layer 4, a second gradient transition layer 5, a tungsten carbide layer 6, and a third gradient transition layer from bottom to top. The transition layer 7 and the surface layer 8, the first gradient transition layer 3 is to continuously increase the content of nitrogen in the first gradient transition layer 3 from the side of the pure metal layer 2 to the side of the metal nitride layer 4 The second gradient transition layer 5 is to continuously change the content of nitrogen in the second gradient transition layer 5 from the side of the metal nitride layer 4 to the side of the tungsten carbide layer. The third gradient transition layer 7 is formed continuously from the side of the tungsten carbide layer 6 toward the side of th...

Embodiment 2

[0059] The surface treatment of embodiment 2, GCr15 bearing steel test piece

[0060] After the GCr15 steel specimen with three-dimensional dimensions of length, width and thickness is 100mm×30mm×2mm is polished, the surface treatment is carried out in the following order.

[0061] S1. Ion source bombardment to clean the surface of the workpiece: place the workpiece in a vacuum chamber so that the pressure of the vacuum chamber is 5×10 - 3 Pa, turn on the heating device, heat the workpiece to 100°C; pass in argon gas, set the vacuum chamber pressure to 0.2Pa, the beam current to 60A, apply a DC bias voltage of 400V to the workpiece, and turn off the DC bias voltage after cleaning for 30 minutes;

[0062] S2. Preparation of pure metal layer: adjust the argon flow rate of the magnetron target source to keep the pressure of the vacuum chamber at 0.5Pa; turn on the DC pulse bias mode, set the frequency to 10kHz, the workpiece bias voltage to 30V, and the duty cycle to 30% , turn...

Embodiment 3

[0071] The surface treatment of embodiment 3, M42 tool steel test piece

[0072] After polishing the M42 tool steel test piece with the three-dimensional dimensions of length, width and thickness of 100mm×30mm×2mm, perform surface treatment in the following order.

[0073] S1. The ion source bombards and cleans the surface of the workpiece: place the workpiece in a vacuum chamber so that the pressure of the vacuum chamber is lower than 5×10 - 3 Pa, turn on the heating device, heat the workpiece to 200°C; pass in argon gas, set the vacuum chamber pressure to 0.2Pa, the beam current to 100A, apply a DC bias voltage of 400V to the workpiece, and turn off the DC bias voltage after cleaning for 30 minutes;

[0074] S2. Preparation of pure metal layer: adjust the argon flow rate of the magnetron target source to keep the pressure of the vacuum chamber at 1Pa; turn on the DC pulse bias mode, set the frequency to 100kHz, the workpiece bias voltage to 50V, and the duty cycle to 80%. ...

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Abstract

The invention relates to metal surface treatment, in particular to surface treatment of low-temperature iron-base alloy molds of sliding components, bearings and the like and provides a diamond-like carbon film of a gradient structure and a preparation method of the diamond-like carbon film of the gradient structure. The diamond-like carbon film of the gradient structure is provided with a coating structure comprising a pure metal layer, a first gradient transition layer, a metal nitride layer, a second gradient transition layer, a tungsten carbide, a third gradient transition layer and a surface layer. The surface layer is a diamond-like layer or a silicon-containing type diamond layer. According to the diamond-like carbon film of the gradient structure, gradient control over elasticity modulus and hardness is achieved through ingredient gradient control between all the layers, and therefore the film-substrate cohesion force and the delaminating resistance of the coating are greatly improved.

Description

technical field [0001] The invention relates to metal surface treatment, in particular to low-temperature mold surface treatment of iron-based alloys such as sliding components and bearings, and provides a diamond-like carbon film with a gradient structure and a preparation method thereof. Background technique [0002] Iron-based metal materials are widely used in sliding parts, such as piston rings, tappets, automotive engine parts; and precision plastics, rubber molds, etc. These parts are required to have extremely high wear resistance and resistance to sliding friction. Appropriate metal surface treatment technology is an important means to meet this requirement. Coating a layer of low friction coefficient coating on the surface can greatly reduce the wear of metal parts and improve the life of the workpiece and processing efficiency. Among them, diamond-like coatings have received extensive attention in the above-mentioned fields. [0003] DLC is the abbreviation of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C28/00
CPCC23C28/32C23C28/343C23C28/36
Inventor 彭继华苏东艺梁献文
Owner 广州今泰科技股份有限公司
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