High-hardness and low-stress multi-element composite diamond-like coating and preparation method thereof

A diamond coating and multi-component compounding technology, which is applied in the direction of metal material coating process, coating, ion implantation plating, etc., can solve the problems of hardness reduction and performance deterioration

Active Publication Date: 2015-01-21
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, after a single doping of metal elements, the DLC coating has the problem of deterioration of other properties while improving certain properties. For example, doping Al in the DLC coating is beneficial to reduce the residual stress of the coating, and the Al doping content is 0.68at %, the stress drop is as high as 43%, and the stress further decreases monotonously with the increase of Al content, but at the same time it is accompanied by a large decrease in hardness
[0006] It can be see

Method used

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  • High-hardness and low-stress multi-element composite diamond-like coating and preparation method thereof
  • High-hardness and low-stress multi-element composite diamond-like coating and preparation method thereof
  • High-hardness and low-stress multi-element composite diamond-like coating and preparation method thereof

Examples

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Embodiment 1

[0039] In Example 1, the coating on the surface of the Si substrate is a multi-component composite diamond-like coating. The multi-component composite diamond-like coating is composed of diamond-like, the first doping element Al and the second doping element is Cr element, referred to as Cr / Al multi-component composite diamond-like coating; and, in the multi-component composite diamond-like coating In the layer, the atomic percentage content of Al element is 4.69%, and the atomic percentage content of Cr element is 1.56%.

[0040] The above-mentioned Cr / Al multi-component composite diamond-like coating is prepared by using a linear ion beam composite magnetron sputtering coating equipment, which includes a vacuum chamber, a linear ion source, a magnetron sputtering source and a workpiece bracket , including the following steps:

[0041] Step 1. Clean the Si substrate:

[0042] Place the Si substrate on the workpiece holder of the vacuum chamber, and adjust the vacuum chamber a...

Embodiment 2

[0077] In Example 2, the coating on the surface of the Si substrate is a multi-component composite diamond-like coating. The multi-component composite diamond-like coating is composed of diamond-like, the first doping element Al and the second doping element is W element, referred to as W / Al multi-component composite diamond-like coating; and, in the multi-component composite diamond-like coating In the layer, the atomic percent content of Al element is 1.56%, and the atomic percent content of W element is 1.56%.

[0078] The above-mentioned W / Al multi-component composite diamond-like coating is prepared by using a linear ion beam composite magnetron sputtering coating equipment, which includes a vacuum chamber, a linear ion source, a magnetron sputtering source and a workpiece bracket , including the following steps:

[0079] Step 1. Clean the Si substrate:

[0080] Place the Si substrate on the workpiece holder of the vacuum chamber, and adjust the vacuum chamber air press...

Embodiment 3

[0096] In Example 2, the coating on the surface of the Si substrate is a multi-component composite diamond-like coating. The multi-component composite diamond-like coating is composed of diamond-like, the first doping element Cu, and the second doping element is Cr element, referred to as Cr / Cu multi-component composite diamond-like coating; and, in the multi-component composite diamond-like coating In the layer, the atomic percentage content of Cu element is 1.56%, and the atomic percentage content of Cr element is 1.56%.

[0097] The above-mentioned Cr / Cu multi-component composite diamond-like coating is prepared by using a linear ion beam composite magnetron sputtering coating equipment, which includes a vacuum chamber, a linear ion source, a magnetron sputtering source and a workpiece bracket , including the following steps:

[0098] Step 1. Clean the Si substrate:

[0099] Place the Si substrate on the workpiece holder of the vacuum chamber, and adjust the vacuum chambe...

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Abstract

The invention discloses a high-hardness and low-stress multi-element composite diamond-like coating. The coating is prepared from diamond-like carbon, a first doping element Al or Cu and a second doping element Cr or W, wherein the atomic percentage contents of the first doping element and the second doping element in the multi-element composite diamond-like coating are respectively 1.56%-4.69%. An experiment proves that the codoped diamond-like coating has high hardness and low stress, simultaneously also has low friction coefficient and attrition rate, good tenacity and corrosion resistance, and high film-based adhesion, therefore, the high-hardness and low-stress multi-element composite diamond-like coating is a multifunctional coating with good overall performance.

Description

technical field [0001] The invention belongs to the technical field of material surface coating, and in particular relates to a high-hardness, low-stress multi-component composite diamond-like coating and a preparation method thereof. Background technique [0002] Diamond-like carbon (DLC) coating has many excellent properties such as high hardness, low friction coefficient, good corrosion resistance, optical transparency and biocompatibility, so it is widely researched and developed in recent years and has broad industrialization. Prospect of a new type of carbon-based functional material. In particular, it has high hardness and low friction coefficient, and its applications in the fields of tooling and mold surface modification and micro-electromechanical systems are even more prominent. [0003] In the preparation process of DLC coating, in order to improve the hardness of the coating, the continuous bombardment of high-energy particles is often used to increase the sp ...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/46C23C14/06
CPCC23C14/0605C23C14/35C23C14/46
Inventor 李晓伟汪爱英张栋柯培玲许辉
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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