Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A reaction device for chemical vapor deposition

A technology of chemical vapor deposition and reaction equipment, which is applied in the field of heat treatment processing, can solve the problems of uncontrollable gas and shallow depth of infiltrated layer, and achieve the effects of improving flexible adjustment, stable quality of infiltrated layer, and high safety

Active Publication Date: 2019-04-05
南京龙力机械制造有限公司
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the gas method is uncontrollable, and the depth of the infiltration layer is relatively shallow

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A reaction device for chemical vapor deposition
  • A reaction device for chemical vapor deposition
  • A reaction device for chemical vapor deposition

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0049] A reaction device for chemical vapor deposition, such as figure 1 with figure 2 As shown, it includes a furnace tank 1, a furnace cover 2 detachably connected to the furnace tank 1, a heating system (not shown in the figure), a pre-vacuumizing system 3, a cooling system 4 and an air circulation system 5, and the metal powder is preliminarily And the penetrating agent is placed on the bottom of the furnace tank 1, preferably aluminum powder, silicon powder or cobalt powder, then the furnace cover 2 is covered on the furnace tank 1, and the pre-vacuumizing system 3 is started to vacuumize the furnace tank 1 , and then start the heating system to heat the retort 1, and open the cooling system 4 at the same time, which is conducive to the stable temperature rise of the retort 1. When the decomposition temperature of the chloride in the penetrating agent is reached, the chlorine gas reacts with the metal powder to form a gaseous chloride. Chloride follows the route of the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses reaction equipment for chemical vapor deposition. According to the technical scheme, the reaction equipment comprises a furnace pot, a furnace cover detachably connected to the furnace pot, a heating system, a pre-vacuumizing system arranged on the furnace cover, a cooling system and an air current circulation system; vacuumizing is conducted on the interior of the furnace pot through the pre-vacuumizing system, the cooling system is started, heating is conducted through the heating system till chloride in an impregnation agent starts to be decomposed and reacts with aluminum powder into Al<x>Cl<y>, HCl and other gaseous compounds, the gaseous compounds react with the surface of a thermal-state blade, and a metal compound impregnating layer is generated on the surface, making contact with the gaseous compounds, of the blade; and meanwhile, under the action of the air current circulation system, the gaseous compounds flow repeatedly along with a complex inner cavity and the outer surface of the blade, and accordingly, the stable-quality impregnating layer is formed on the surface of the blade.

Description

technical field [0001] The invention relates to heat treatment processing, in particular to a reaction device for chemical vapor deposition. Background technique [0002] Engine high-pressure turbine guide vanes are important hot-end components of aero-engines. Under working conditions, high-temperature oxidation and corrosion phenomena exist on the surface of the guide vanes, especially the internal cavity corrosion and oxidation of the blades, which have become a technical problem in engine design. In order to improve the reliability of the blade and prolong the service life of the blade, the high temperature protection technology is adopted on the surface of the inner and outer flow channels of the high guide vane, that is, an aluminized layer with a depth of 0.02~0.055mm is prepared on the surface of the outer flow channel of the high guide vane, and the inner cavity is prepared 0.01 ~0.035mm aluminized layer, which plays a good role in high temperature oxidation resista...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/44C23C16/06
CPCC23C16/06C23C16/44
Inventor 季万洪季年国季年军
Owner 南京龙力机械制造有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com