Soft X-ray imaging device of vacuum flight pipeline
An imaging device and X-ray technology, applied in the field of X-ray imaging, can solve the problems of reducing test efficiency, increasing sample detection cost, limiting the popularization and application of soft X-ray imaging, etc., and achieving the goal of reducing application cost, reducing propagation distance, and reducing attenuation Effect
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[0018] The present invention will be described in detail below with reference to the accompanying drawings and examples.
[0019] The invention provides a soft X-ray imaging device for a vacuum flight pipeline, see the attached figure 1 , including: X-ray tube 1, sample stage 2, vacuum flight pipeline 3 and X-ray camera 4;
[0020] The X-ray tube 1 is used to emit soft X-rays, and an X-ray emission source point 5 is arranged inside, and an X-ray tube light outlet 6 is processed on the end face;
[0021] The vacuum flight pipe 3 is a cylindrical shell with both ends closed, and its two ends are respectively processed with axial through holes, and the incident beryllium windows 7 and outgoing beryllium windows 8 are respectively installed on the axial through holes to seal them. The interior of the vacuum flight pipe 3 is in a vacuum state; the length of the vacuum flight pipe 3 is determined according to the set imaging magnification, its shape is square or circular, and the s...
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