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Soft X-ray imaging device of vacuum flight pipeline

An imaging device and X-ray technology, applied in the field of X-ray imaging, can solve the problems of reducing test efficiency, increasing sample detection cost, limiting the popularization and application of soft X-ray imaging, etc., and achieving the goal of reducing application cost, reducing propagation distance, and reducing attenuation Effect

Pending Publication Date: 2018-01-09
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
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  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since placing the entire imaging device in a vacuum test environment will significantly increase the cost of sample testing and reduce the efficiency of testing, this limits the popularization and application of soft X-ray imaging in manufacturing product testing

Method used

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  • Soft X-ray imaging device of vacuum flight pipeline

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Embodiment Construction

[0018] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0019] The invention provides a soft X-ray imaging device for a vacuum flight pipeline, see the attached figure 1 , including: X-ray tube 1, sample stage 2, vacuum flight pipeline 3 and X-ray camera 4;

[0020] The X-ray tube 1 is used to emit soft X-rays, and an X-ray emission source point 5 is arranged inside, and an X-ray tube light outlet 6 is processed on the end face;

[0021] The vacuum flight pipe 3 is a cylindrical shell with both ends closed, and its two ends are respectively processed with axial through holes, and the incident beryllium windows 7 and outgoing beryllium windows 8 are respectively installed on the axial through holes to seal them. The interior of the vacuum flight pipe 3 is in a vacuum state; the length of the vacuum flight pipe 3 is determined according to the set imaging magnification, its shape is square or circular, and the s...

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PUM

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Abstract

The invention discloses a soft X-ray imaging device of a vacuum flight pipeline and belongs to the technical field of X-ray imaging. The soft X-ray imaging device comprises an X-ray tube, a sample platform, the vacuum flight pipeline and an X-ray camera, wherein coaxial through holes are machined on two opposite end faces of the vacuum flight pipeline; an incidence beryllium window and an emissionberyllium window are mounted on the two through holes respectively and are used for sealing the two through holes; the inner part of the vacuum flight pipeline has a vacuum state; the vacuum flight pipeline is located between the X-ray tube and the X-ray camera; the sample platform for fixing a sample is located between the X-ray tube and the vacuum flight pipeline; the incidence beryllium windowof the vacuum flight pipeline is clung to the sample platform; the emission beryllium window is clung to a recording surface of the X-ray camera; an X-ray emission source point of the X-ray tube, thecenter of the sample, the centers of the incidence beryllium window and the emission beryllium window and the center of the recording surface of the X-ray camera are located on the same straight line; the device can be used for carrying out soft X-ray imaging on the sample under an atmospheric environment.

Description

technical field [0001] The invention belongs to the technical field of X-ray imaging, and in particular relates to a soft X-ray imaging device for a vacuum flight pipeline. Background technique [0002] X-ray imaging is a technique widely used in scientific research and industrial production. X-rays have a strong transmission ability, can penetrate the sample, form a transmission image of the object on the recording device, and can perform perspective imaging of the sample without destroying the shape of the sample. X-ray imaging usually uses different parts of the sample to absorb X-rays differently to form a perspective image. For samples with light weight and very thin thickness, since the absorption difference caused by hard X-ray imaging is not large, it is necessary to use soft X-ray imaging to improve the contrast and resolution of the imaging. However, soft X-rays propagating in the atmosphere will be strongly absorbed by the air, which will weaken the signal inten...

Claims

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Application Information

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IPC IPC(8): G01N23/04
Inventor 易涛
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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